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Description
  • Kontrast mezi rozdílně dopovanými oblastmi polovodiče může být pozorován v rastrovacím elektronové mikroskopu v signálu sekundárních elektronů. Na různě dopovaných vzorcích bylo studováno chování kontrastu v závislosti na dávce dopadajících elektronů, jejich energii a přítomnosti vrstvy nad povrchem polovodiče. (cs)
  • Contrast between differently doped areas in semiconductors can be observed in the secondary electron emission in a scanning electron microscope. Behaviour of the contrast in dependence on the incident electron dose and energy and on the presence of surface adlayers has been studied on different doped samples.
  • Contrast between differently doped areas in semiconductors can be observed in the secondary electron emission in a scanning electron microscope. Behaviour of the contrast in dependence on the incident electron dose and energy and on the presence of surface adlayers has been studied on different doped samples. (en)
Title
  • Dynamic Behaviour of the Dopant Contrast in LVSEM
  • Dynamic Behaviour of the Dopant Contrast in LVSEM (en)
  • Dynamické chování kontrastu dopantů v LVSEM (cs)
skos:prefLabel
  • Dynamic Behaviour of the Dopant Contrast in LVSEM
  • Dynamic Behaviour of the Dopant Contrast in LVSEM (en)
  • Dynamické chování kontrastu dopantů v LVSEM (cs)
skos:notation
  • RIV/68081731:_____/07:00092590!RIV08-GA0-68081731
http://linked.open.../vavai/riv/strany
  • 95;96
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • P(GA102/05/2327), Z(AV0Z20650511)
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 418372
http://linked.open...ai/riv/idVysledku
  • RIV/68081731:_____/07:00092590
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • dopant contrast; LVSEM; secondary electrons (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...ontrolniKodProRIV
  • [8DE47C9E4143]
http://linked.open...v/mistoKonaniAkce
  • Prague
http://linked.open...i/riv/mistoVydani
  • Prague
http://linked.open...i/riv/nazevZdroje
  • Proceedings of the 8th Multinational Congress on Microscopy
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...vavai/riv/projekt
http://linked.open...UplatneniVysledku
http://linked.open...iv/tvurceVysledku
  • Frank, Luděk
  • Mika, Filip
http://linked.open...vavai/riv/typAkce
http://linked.open.../riv/zahajeniAkce
http://linked.open...n/vavai/riv/zamer
number of pages
http://purl.org/ne...btex#hasPublisher
  • Czechoslovak Microscopy Society
https://schema.org/isbn
  • 978-80-239-9397-4
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