About: Imaging of Non-Conductive Samples by Means of Low Energy Backscattered Electrons in SEM

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	Článek se zabývá problémy zobrazování nevodivých vzorků v SEM, které jsou způsobovány především jejich nabíjením. Použití nízké energie primárního svazku a pozorování pomocí zpětně odražených elektronů bylo navrženo pro potlačení nábojových artefaktů v obraze. Dále je popsán nově vyvinutý detektor zpětně odražených elektronů pro nízkoenrgiovou SEM a jsou prezentovány obrázky nepokovených nevodivých vzorků bez nábojových artefaktů pořízené tímto detektorem. (cs) Article deals with the problems of imaging of non-conductive samples in the SEM that are caused mainly by charging. Use of the low primary beam energy and the observation by means of backscattered electrons are proposed as methods of suppression of charging artifacts in the image. Newly developed detector of backscattered electrons for the low energy SEM is described and images of uncoated non-conductive samples without charging artifacts taken by this detector are presented. Article deals with the problems of imaging of non-conductive samples in the SEM that are caused mainly by charging. Use of the low primary beam energy and the observation by means of backscattered electrons are proposed as methods of suppression of charging artifacts in the image. Newly developed detector of backscattered electrons for the low energy SEM is described and images of uncoated non-conductive samples without charging artifacts taken by this detector are presented. (en)
Title	Imaging of Non-Conductive Samples by Means of Low Energy Backscattered Electrons in SEM Imaging of Non-Conductive Samples by Means of Low Energy Backscattered Electrons in SEM (en) Zobrazování nevodivých vzorků pomocí nízkoenergiových zpětně odražených elektronů v SEM (cs)
skos:prefLabel	Imaging of Non-Conductive Samples by Means of Low Energy Backscattered Electrons in SEM Imaging of Non-Conductive Samples by Means of Low Energy Backscattered Electrons in SEM (en) Zobrazování nevodivých vzorků pomocí nízkoenergiových zpětně odražených elektronů v SEM (cs)
skos:notation	RIV/68081731:_____/07:00092374!RIV08-AV0-68081731
http://linked.open.../vavai/riv/strany	111;112
http://linked.open...avai/riv/aktivita	P Z
http://linked.open...avai/riv/aktivity	P(KJB200650501), Z(AV0Z20650511)
http://linked.open...vai/riv/dodaniDat	2008
http://linked.open...aciTvurceVysledku	Wandrol, Petr
http://linked.open.../riv/druhVysledku	D - Článek ve sborníku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Ústav přístrojové techniky AV ČR, v. v. i.
http://linked.open...dnocenehoVysledku	425497
http://linked.open...ai/riv/idVysledku	RIV/68081731:_____/07:00092374
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	non-conductive samples; low energy SEM; backscattered electrons; charging (en)
http://linked.open.../riv/klicoveSlovo	backscattered electrons non-conductive samples charging low energy SEM
http://linked.open...ontrolniKodProRIV	[077600781E43]
http://linked.open...v/mistoKonaniAkce	Prague
http://linked.open...i/riv/mistoVydani	Prague
http://linked.open...i/riv/nazevZdroje	Proceedings of the 8th Multinational Congress on Microscopy
http://linked.open...in/vavai/riv/obor	JA
http://linked.open...ichTvurcuVysledku	1 (xsd:int)
http://linked.open...cetTvurcuVysledku	1 (xsd:int)
http://linked.open...vavai/riv/projekt	Detection of signal electrons in scaning electron microscopy with low primary beam energies
http://linked.open...UplatneniVysledku	2007
http://linked.open...iv/tvurceVysledku	Wandrol, Petr
http://linked.open...vavai/riv/typAkce	EUR - Evropská
http://linked.open.../riv/zahajeniAkce	2007-06-17 (xsd:date)
http://linked.open...n/vavai/riv/zamer	Research into experimental methods for examination of the physical properties of matter and their application in advanced technologies
number of pages	2 (xsd:int)
http://purl.org/ne...btex#hasPublisher	Czechoslovak Microscopy Society
https://schema.org/isbn	978-80-239-9397-4
is http://linked.open...avai/riv/vysledek of	Imaging of Non-Conductive Samples by Means of Low Energy Backscattered Electrons in SEM Imaging of Non-Conductive Samples by Means of Low Energy Backscattered Electrons in SEM Imaging of Non-Conductive Samples by Means of Low Energy Backscattered Electrons in SEM

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