| Attributes | Values |
|---|
| rdf:type
| |
| Description
| - Standardní způsob detekce sekundárních elektronů v rastrovacím elektronovém mikroskopu (REM) je pomocí Everhartova-Thornleyho (ET) detektoru. Systém, kde pouze slabé elektrostatické pole přitahuje nízkoenergiové sekundární elektrony, nazveme standardní detektor. Ačkoli je ET detektor znám 50 let, stále je nejčastěji používaným detektorem v REM. V současných REM se používá pro dosažení lepšího rozlišení tzv. imersní systém umožňující aby silné magnetické pole objektivové čočky pronikalo do oblasti vzorku. V tomto systému se používají obvykle dva ET detektory: jeden umístěný v objektivové čočce a druhý pod ní (horní a spodní detektor). Výsledný kontrast SE obrazu závisí na energii sekundárních elektronů a na úhlové citlivosti detektorů, která je výsledkem konkrétních rozložení elektrostatických a magnetických polí v oblasti vzorku. (cs)
- The standard way of secondary electron (SE) detection in the scanning electron microscope (SEM) is to use the Everhart-Thornley (ET) detector. Only weak electrostatic field attracts low energy SEs. Let us call this system the standard detector. Although the ET detector has been around for more than fifty years, it remains the most frequently used type of detector in SEMs. Modern SEMs have improved their image resolution by so called immersion systems, allowing a strong magnetic field of the objective lens to penetrate into the specimen region. In that case, two ET detectors are usually used: one is located above the objective lens, and the other below it (upper and lower detector). The resulting contrast of the SE images depends on SE energy and on the angular sensitivity of detectors, which is a result of specific distributions of electrostatic and magnetic fields in the specimen region.
- The standard way of secondary electron (SE) detection in the scanning electron microscope (SEM) is to use the Everhart-Thornley (ET) detector. Only weak electrostatic field attracts low energy SEs. Let us call this system the standard detector. Although the ET detector has been around for more than fifty years, it remains the most frequently used type of detector in SEMs. Modern SEMs have improved their image resolution by so called immersion systems, allowing a strong magnetic field of the objective lens to penetrate into the specimen region. In that case, two ET detectors are usually used: one is located above the objective lens, and the other below it (upper and lower detector). The resulting contrast of the SE images depends on SE energy and on the angular sensitivity of detectors, which is a result of specific distributions of electrostatic and magnetic fields in the specimen region. (en)
|
| Title
| - Strategies for Collection of Secondary Electrons in the SEM
- Strategie sběru sekundárních elektronů v REM (cs)
- Strategies for Collection of Secondary Electrons in the SEM (en)
|
| skos:prefLabel
| - Strategies for Collection of Secondary Electrons in the SEM
- Strategie sběru sekundárních elektronů v REM (cs)
- Strategies for Collection of Secondary Electrons in the SEM (en)
|
| skos:notation
| - RIV/68081731:_____/07:00089380!RIV08-AV0-68081731
|
| http://linked.open.../vavai/riv/strany
| |
| http://linked.open...avai/riv/aktivita
| |
| http://linked.open...avai/riv/aktivity
| - P(KJB200650501), Z(AV0Z20650511)
|
| http://linked.open...iv/cisloPeriodika
| |
| http://linked.open...vai/riv/dodaniDat
| |
| http://linked.open...aciTvurceVysledku
| |
| http://linked.open.../riv/druhVysledku
| |
| http://linked.open...iv/duvernostUdaju
| |
| http://linked.open...titaPredkladatele
| |
| http://linked.open...dnocenehoVysledku
| |
| http://linked.open...ai/riv/idVysledku
| - RIV/68081731:_____/07:00089380
|
| http://linked.open...riv/jazykVysledku
| |
| http://linked.open.../riv/klicovaSlova
| - collection efficiency; secondary electrons; ET detector; magnetic field (en)
|
| http://linked.open.../riv/klicoveSlovo
| |
| http://linked.open...odStatuVydavatele
| - US - Spojené státy americké
|
| http://linked.open...ontrolniKodProRIV
| |
| http://linked.open...i/riv/nazevZdroje
| - Microscopy and Microanalysis
|
| http://linked.open...in/vavai/riv/obor
| |
| http://linked.open...ichTvurcuVysledku
| |
| http://linked.open...cetTvurcuVysledku
| |
| http://linked.open...vavai/riv/projekt
| |
| http://linked.open...UplatneniVysledku
| |
| http://linked.open...v/svazekPeriodika
| |
| http://linked.open...iv/tvurceVysledku
| - Konvalina, Ivo
- Hovorka, Miloš
- Müllerová, Ilona
- Mika, Filip
- Wandrol, Petr
|
| http://linked.open...n/vavai/riv/zamer
| |
| issn
| |
| number of pages
| |
| is http://linked.open...avai/riv/vysledek
of | |
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