About: Multi-Channel Detection of the Angular Distribution of Backscattered Electrons in the Scanning Low Energy Electron Microscope

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About: Multi-Channel Detection of the Angular Distribution of Backscattered Electrons in the Scanning Low Energy Electron Microscope Goto Sponge NotDistinct Permalink

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	A multi-channel plate based detector of backscattered electrons (BSE) with eight-channel collector has been designed and tested. Combination of with the cathode lens enables one to acquire also slow BSE and high-angle emitted BSE that are not acquired with standard detector assemblies. Basic performance data are presented. A multi-channel plate based detector of backscattered electrons (BSE) with eight-channel collector has been designed and tested. Combination of with the cathode lens enables one to acquire also slow BSE and high-angle emitted BSE that are not acquired with standard detector assemblies. Basic performance data are presented. (en) Byl navržen a odzkoušen detektor zpětně odražených elektronů (BSE) na bázi kanálkové destičky, opatřený osmikanálovým kolektorem. Jeho kombinace s katodovou čočkou umožňuje zachycovat rovněž pomalé BSE a BSE emitované pod vysokými úhly vůči normále k povrchu, které standardní detektory nedetekují. Jsou prezentovány základny parametry systému. (cs)
Title	Multi-Channel Detection of the Angular Distribution of Backscattered Electrons in the Scanning Low Energy Electron Microscope Multi-Channel Detection of the Angular Distribution of Backscattered Electrons in the Scanning Low Energy Electron Microscope (en) Mnohakanálová detekce úhlového rozdělení zpětně odražených elektronů v rastrovacím nízkoenergiovém elektronovém mikroskopu (cs)
skos:prefLabel	Multi-Channel Detection of the Angular Distribution of Backscattered Electrons in the Scanning Low Energy Electron Microscope Multi-Channel Detection of the Angular Distribution of Backscattered Electrons in the Scanning Low Energy Electron Microscope (en) Mnohakanálová detekce úhlového rozdělení zpětně odražených elektronů v rastrovacím nízkoenergiovém elektronovém mikroskopu (cs)
skos:notation	RIV/68081731:_____/06:00044292!RIV07-AV0-68081731
http://linked.open.../vavai/riv/strany	CD:1438;1439
http://linked.open...avai/riv/aktivita	P Z
http://linked.open...avai/riv/aktivity	P(GA102/05/2327), Z(AV0Z20650511)
http://linked.open...iv/cisloPeriodika	Suppl. 2
http://linked.open...vai/riv/dodaniDat	2007
http://linked.open...aciTvurceVysledku	Müllerová, Ilona Konvalina, Ivo
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Ústav přístrojové techniky AV ČR, v. v. i.
http://linked.open...dnocenehoVysledku	487227
http://linked.open...ai/riv/idVysledku	RIV/68081731:_____/06:00044292
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	BSE detection; multi-channel detector; cathode lens; angular distribution (en)
http://linked.open.../riv/klicoveSlovo	cathode lens angular distribution BSE detection multi-channel detector
http://linked.open...odStatuVydavatele	US - Spojené státy americké
http://linked.open...ontrolniKodProRIV	[52BED7EE892C]
http://linked.open...i/riv/nazevZdroje	Microscopy and Microanalysis
http://linked.open...in/vavai/riv/obor	JA
http://linked.open...ichTvurcuVysledku	2 (xsd:int)
http://linked.open...cetTvurcuVysledku	2 (xsd:int)
http://linked.open...vavai/riv/projekt	Direct imaging of the dopant distribution in a semiconductor by means of low energy clectrons
http://linked.open...UplatneniVysledku	2006
http://linked.open...v/svazekPeriodika	12
http://linked.open...iv/tvurceVysledku	Konvalina, Ivo Müllerová, Ilona
http://linked.open...n/vavai/riv/zamer	Research into experimental methods for examination of the physical properties of matter and their application in advanced technologies
issn	1431-9276
number of pages	2 (xsd:int)
is http://linked.open...avai/riv/vysledek of	Multi-Channel Detection of the Angular Distribution of Backscattered Electrons in the Scanning Low Energy Electron Microscope Multi-Channel Detection of the Angular Distribution of Backscattered Electrons in the Scanning Low Energy Electron Microscope

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