About: The Trajectories of Secondary Electrons in the Scanning Electron Microscope

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	Three-dimensional simulations of the trajectories of secondary electrons (SE) in the scanning electron microscope have been performed for plenty of real configurations of the specimen chamber, including all its basic components. The primary purpose was to evaluate the collection efficiency of the Everhart-Thornley detector of SE and to reveal fundamental rules for tailoring the set-ups in which efficient signal acquisition can be expected. Intuitive realizations about the easiness of attracting the SEs towards the biased front grid of the detector have shown themselves as likely false, and all grounded objects in the chamber have been proven to influence the spatial distribution of the signal-extracting field. The role of the magnetic field penetrating from inside the objective lens is shown to play an ambiguous role regarding possible support for the signal collection. Three-dimensional simulations of the trajectories of secondary electrons (SE) in the scanning electron microscope have been performed for plenty of real configurations of the specimen chamber, including all its basic components. The primary purpose was to evaluate the collection efficiency of the Everhart-Thornley detector of SE and to reveal fundamental rules for tailoring the set-ups in which efficient signal acquisition can be expected. Intuitive realizations about the easiness of attracting the SEs towards the biased front grid of the detector have shown themselves as likely false, and all grounded objects in the chamber have been proven to influence the spatial distribution of the signal-extracting field. The role of the magnetic field penetrating from inside the objective lens is shown to play an ambiguous role regarding possible support for the signal collection. (en) Pro mnoho reálných konfigurací komory vzorku byly provedeny 3D simulace trajektorií sekundárních elektronů (SE) v rastrovacím elektronovém mikroskopu, včetně všech základních komponent. Hlavním cílem bylo vyčíslit sběrovou účinnost Everharta-Thornleyho detektoru sekundárních elektronů a nalézt základní pravidla pro upravování uspořádání aby se dosáhlo lepší signálové akvizice. Původní myšlenka snadného přitažení SE k mřížce detektoru se ukázala mylná, protože uzemněné objekty v komoře prokazatelně ovlivňují prostorové rozložení extrakčních polí. Magnetické pole penetrující z objektivu má dvouznačnou roli týkající se možné podpory sběru signálu. (cs)
Title	The Trajectories of Secondary Electrons in the Scanning Electron Microscope The Trajectories of Secondary Electrons in the Scanning Electron Microscope (en) Trajektorie sekundárních elektronů v rastrovacím elektronovém mikroskopu (cs)
skos:prefLabel	The Trajectories of Secondary Electrons in the Scanning Electron Microscope The Trajectories of Secondary Electrons in the Scanning Electron Microscope (en) Trajektorie sekundárních elektronů v rastrovacím elektronovém mikroskopu (cs)
skos:notation	RIV/68081731:_____/06:00043768!RIV07-AV0-68081731
http://linked.open.../vavai/riv/strany	245;256
http://linked.open...avai/riv/aktivita	P Z
http://linked.open...avai/riv/aktivity	P(GA102/05/2327), Z(AV0Z20650511)
http://linked.open...iv/cisloPeriodika	5
http://linked.open...vai/riv/dodaniDat	2007
http://linked.open...aciTvurceVysledku	Müllerová, Ilona Konvalina, Ivo
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Ústav přístrojové techniky AV ČR, v. v. i.
http://linked.open...dnocenehoVysledku	504144
http://linked.open...ai/riv/idVysledku	RIV/68081731:_____/06:00043768
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	ET detector; secondary electrons; collection efficiency (en)
http://linked.open.../riv/klicoveSlovo	collection efficiency secondary electrons ET detector
http://linked.open...odStatuVydavatele	US - Spojené státy americké
http://linked.open...ontrolniKodProRIV	[440868449BFE]
http://linked.open...i/riv/nazevZdroje	Scanning
http://linked.open...in/vavai/riv/obor	JA
http://linked.open...ichTvurcuVysledku	2 (xsd:int)
http://linked.open...cetTvurcuVysledku	2 (xsd:int)
http://linked.open...vavai/riv/projekt	Direct imaging of the dopant distribution in a semiconductor by means of low energy clectrons
http://linked.open...UplatneniVysledku	2006
http://linked.open...v/svazekPeriodika	28
http://linked.open...iv/tvurceVysledku	Konvalina, Ivo Müllerová, Ilona
http://linked.open...n/vavai/riv/zamer	Research into experimental methods for examination of the physical properties of matter and their application in advanced technologies
issn	0161-0457
number of pages	12 (xsd:int)
is http://linked.open...avai/riv/vysledek of	The Trajectories of Secondary Electrons in the Scanning Electron Microscope The Trajectories of Secondary Electrons in the Scanning Electron Microscope

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