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| rdf:type
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| Description
| - Modern Scanning Electron Microscopes (SEM) are capable of providing high image resolution in units of nm even at low energies down to hundreds of eV. If the cathode lens principle is employed in a conventional SEM column, a similar resolution is achievable at very low energies in the order of tens or units of eV. The final contrast in the image is a product of interaction of primary electrons with the target but also the collection efficiency of detector with its energy and angular distributions. In order to arrive at a high signal to noise ratio (SNR), the signal species should be caught as many as possible but formation of a high contrast might require selecting only a small part of the emission spectra and putting up with a lowered SNR. Promising in this respect are multichannel parallel detectors. We would like to attract attention to energy and angular distributions of both emission and collection of signal electrons because their importance increases at low energies.
- Modern Scanning Electron Microscopes (SEM) are capable of providing high image resolution in units of nm even at low energies down to hundreds of eV. If the cathode lens principle is employed in a conventional SEM column, a similar resolution is achievable at very low energies in the order of tens or units of eV. The final contrast in the image is a product of interaction of primary electrons with the target but also the collection efficiency of detector with its energy and angular distributions. In order to arrive at a high signal to noise ratio (SNR), the signal species should be caught as many as possible but formation of a high contrast might require selecting only a small part of the emission spectra and putting up with a lowered SNR. Promising in this respect are multichannel parallel detectors. We would like to attract attention to energy and angular distributions of both emission and collection of signal electrons because their importance increases at low energies. (en)
- Moderní rastrovací elektronové mikroskopy (REM) umožňují dosažení vysokého rozlišení obrazu v jednotkách nm, a to i na nízkých energiích stovek eV. Jestliže je v běžném REM použit princip katodové čočky, je možné dosáhnout podobného rozlišení na velmi nízkých energiích v řádu desítek až jednotek eV. Výsledný kontrast obrazu je energiově i úhlově závislý, neboť je ovlivněn jak interakcí primárních elektronů se vzorkem, tak sběrovou účinností detektoru. Abychom dosáhli vysokého poměru signálu k šumu (SNR) měli bychom detekovat co možná největší počet částic, avšak zajištění vysokého kontrastu může být podmíněno výběrem pouze malé části emisního spektra, což vede ke snížení SNR. Z tohoto pohledu jsou slibné mnohakanálové paralelní detektory. Rádi bychom zde upozornili jak na energiové a úhlové rozložení emitujících elektronů, tak i na energiovou a úhlovou závislost sběrové účinnosti signálních elektronů, protože jejich důležitost na nízkých energiích vzrůstá. (cs)
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| Title
| - Remarks to angular and energy sensitivity of image contrast formation in low energy SEM
- Poznámky k úhlové a energiové citlivosti tvorby obrazového kontrastu v nízkoenergiovém REM (cs)
- Remarks to angular and energy sensitivity of image contrast formation in low energy SEM (en)
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| skos:prefLabel
| - Remarks to angular and energy sensitivity of image contrast formation in low energy SEM
- Poznámky k úhlové a energiové citlivosti tvorby obrazového kontrastu v nízkoenergiovém REM (cs)
- Remarks to angular and energy sensitivity of image contrast formation in low energy SEM (en)
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| skos:notation
| - RIV/68081731:_____/05:00022547!RIV06-AV0-68081731
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| http://linked.open.../vavai/riv/strany
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| http://linked.open...avai/riv/aktivita
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| http://linked.open...avai/riv/aktivity
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| http://linked.open...vai/riv/dodaniDat
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| http://linked.open...aciTvurceVysledku
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| http://linked.open.../riv/druhVysledku
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| http://linked.open...iv/duvernostUdaju
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| http://linked.open...titaPredkladatele
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| http://linked.open...dnocenehoVysledku
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| http://linked.open...ai/riv/idVysledku
| - RIV/68081731:_____/05:00022547
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| http://linked.open...riv/jazykVysledku
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| http://linked.open.../riv/klicovaSlova
| - low energy electrons; collection efficiency; scanning electron microscope (en)
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| http://linked.open.../riv/klicoveSlovo
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| http://linked.open...ontrolniKodProRIV
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| http://linked.open...v/mistoKonaniAkce
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| http://linked.open...i/riv/mistoVydani
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| http://linked.open...i/riv/nazevZdroje
| - Proceedings - 7th Multinational Congress on Microscopy (MCM 2005)
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| http://linked.open...in/vavai/riv/obor
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| http://linked.open...ichTvurcuVysledku
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| http://linked.open...cetTvurcuVysledku
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| http://linked.open...vavai/riv/projekt
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| http://linked.open...UplatneniVysledku
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| http://linked.open...iv/tvurceVysledku
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| http://linked.open...vavai/riv/typAkce
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| http://linked.open.../riv/zahajeniAkce
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| number of pages
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| http://purl.org/ne...btex#hasPublisher
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| https://schema.org/isbn
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| is http://linked.open...avai/riv/vysledek
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