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Description
  • The detectors usually used for the collection of signal electrons in scanning electron microscopes (SEM) give little or no information on the angular or energy distribution of signal. If such an information is needed, another type of detector, a matrix CCD detector, has to be applied. Our paper describes the design of a SEM using this type of detector. The experimental apparatus designed at ISI Brno is an ultra high vacuum (UHV) low energy SEM (LESEM) with a cathode lens.
  • The detectors usually used for the collection of signal electrons in scanning electron microscopes (SEM) give little or no information on the angular or energy distribution of signal. If such an information is needed, another type of detector, a matrix CCD detector, has to be applied. Our paper describes the design of a SEM using this type of detector. The experimental apparatus designed at ISI Brno is an ultra high vacuum (UHV) low energy SEM (LESEM) with a cathode lens. (en)
  • Detektory používané v rastrovacím elektronovém mikroskopu (REM) dávají malou nebo vůbec žádnou informaci o energiovém nebo úhlovém rozdělení signálních elektronů. Jestliže je taková informace potřebná, musí být použit jiný typ detektoru – maticový CCD detektor. Článek popisuje návrh REM s tímto typem detektoru. Experimentální aparatura navržená v ÚPT AV ČR je ultravakuový nízko-energiový REM s katodovou čočkou. (cs)
Title
  • Design of low energy SEM with electrostatic optics and matrix detector
  • Návrh nízko-energiového rastrovacího elektronového mikroskopu s elektrostatickou optikou a maticovým detektorem (cs)
  • Design of low energy SEM with electrostatic optics and matrix detector (en)
skos:prefLabel
  • Design of low energy SEM with electrostatic optics and matrix detector
  • Návrh nízko-energiového rastrovacího elektronového mikroskopu s elektrostatickou optikou a maticovým detektorem (cs)
  • Design of low energy SEM with electrostatic optics and matrix detector (en)
skos:notation
  • RIV/68081731:_____/05:00022419!RIV06-GA0-68081731
http://linked.open.../vavai/riv/strany
  • 365;366
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • P(GA202/03/1575)
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 517400
http://linked.open...ai/riv/idVysledku
  • RIV/68081731:_____/05:00022419
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • low energy SEM; Wien filter; CCD detector (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...ontrolniKodProRIV
  • [BDB4EA6C988A]
http://linked.open...v/mistoKonaniAkce
  • Portorož
http://linked.open...i/riv/mistoVydani
  • Ljubljana
http://linked.open...i/riv/nazevZdroje
  • Proceedings - 7th Multinational Congress on Microscopy (MCM 2005)
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...vavai/riv/projekt
http://linked.open...UplatneniVysledku
http://linked.open...iv/tvurceVysledku
  • Horáček, Miroslav
  • Lencová, Bohumila
  • Vlček, Ivan
http://linked.open...vavai/riv/typAkce
http://linked.open.../riv/zahajeniAkce
number of pages
http://purl.org/ne...btex#hasPublisher
  • Jožef Stefan Institute
https://schema.org/isbn
  • 961-6303-69-4
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