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Description
  • Application of the low accelerating voltage of the primary electron beam became due to its obvious advantages very popular in last decade. Instruments which are able to work with accelerating voltage of 3 keV and lower are called Low Voltage Scanning Electron Microscopes (LV SEMs). Detection of the backscattered electrons (BSEs) in LV SEM is because of their low energy very questionable. An efficient way of low energy BSE detection is described in this work.
  • Application of the low accelerating voltage of the primary electron beam became due to its obvious advantages very popular in last decade. Instruments which are able to work with accelerating voltage of 3 keV and lower are called Low Voltage Scanning Electron Microscopes (LV SEMs). Detection of the backscattered electrons (BSEs) in LV SEM is because of their low energy very questionable. An efficient way of low energy BSE detection is described in this work. (en)
  • Použití nízkého urychlovacího napětí při pozorování zkoumaného objektu se stalo v posledním desetiletí velmi populární. Přístroje schopné pracovat s dostatečným rozlišením s urychlovacím napětím menším než 3 kV jsou nazývány nízkonapěťové rastrovací elektronové mikroskopy (LV SEM). Detekce zpětně odražených elektronů (BSE) v LV SEM byla až donedávna velmi obtížná. Práce popisuje účinný způsob detekce nízkoenergiových BSE pomocí změny jejich energií a trajektorií. (cs)
Title
  • Detection of Low Energy Backscattered Electrons in SEM
  • Detekce nízkoenergiových zpětně odražených elektronů v SEM (cs)
  • Detection of Low Energy Backscattered Electrons in SEM (en)
skos:prefLabel
  • Detection of Low Energy Backscattered Electrons in SEM
  • Detekce nízkoenergiových zpětně odražených elektronů v SEM (cs)
  • Detection of Low Energy Backscattered Electrons in SEM (en)
skos:notation
  • RIV/68081731:_____/05:00022408!RIV06-AV0-68081731
http://linked.open.../vavai/riv/strany
  • 61
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • P(KJB200650501)
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
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http://linked.open...dnocenehoVysledku
  • 517478
http://linked.open...ai/riv/idVysledku
  • RIV/68081731:_____/05:00022408
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • low energy BSE; low voltage scanning electron microscope; detection (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...ontrolniKodProRIV
  • [1FA6FD299963]
http://linked.open...v/mistoKonaniAkce
  • Davos
http://linked.open...i/riv/mistoVydani
  • Villigen
http://linked.open...i/riv/nazevZdroje
  • Proceedings - Microscopy Conference 2005 - Dreiländertagung /6./
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...vavai/riv/projekt
http://linked.open...UplatneniVysledku
http://linked.open...iv/tvurceVysledku
  • Autrata, Rudolf
  • Wandrol, Petr
http://linked.open...vavai/riv/typAkce
http://linked.open.../riv/zahajeniAkce
issn
  • 1019-6447
number of pages
http://purl.org/ne...btex#hasPublisher
  • Paul Scherrer Institute
is http://linked.open...avai/riv/vysledek of
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