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  • Our paper describes the design of detector optics for a low-energy SEM (LESEM) with a cathode lens. The cathode lens not only determines the optical properties of LESEM but it also accelerates the signal electrons into the column, where the signal electrons are separated by a weak Wien filter from the primary beam and they are transferred in the direction of the CCD detector by an electrostatic transfer lens.
  • Our paper describes the design of detector optics for a low-energy SEM (LESEM) with a cathode lens. The cathode lens not only determines the optical properties of LESEM but it also accelerates the signal electrons into the column, where the signal electrons are separated by a weak Wien filter from the primary beam and they are transferred in the direction of the CCD detector by an electrostatic transfer lens. (en)
  • Příspěvek se zabývá návrhem detekční optiky pro nízko-energiový rastrovací elektronový mikroskop s katodovou čočkou. Katodová čočka nejenom určuje optické vlastnosti mikroskopu tohoto typu, ale také urychluje signální elektrony dovnitř tubusu. Zde jsou signální elektrony separovány pomocí slabého Wienova filtru od elektronů primárního svazku a pomocí elektrostatické transportní čočky jsou směrovány na CCD detektor. (cs)
Title
  • Design Of Detector Optics For A Low Energy SEM
  • Design Of Detector Optics For A Low Energy SEM (en)
  • Návrh detekční optické trasy pro nízko-energiový rastrovací elektronový mikroskop (cs)
skos:prefLabel
  • Design Of Detector Optics For A Low Energy SEM
  • Design Of Detector Optics For A Low Energy SEM (en)
  • Návrh detekční optické trasy pro nízko-energiový rastrovací elektronový mikroskop (cs)
skos:notation
  • RIV/68081731:_____/05:00022407!RIV06-GA0-68081731
http://linked.open.../vavai/riv/strany
  • 59
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  • P(GA202/03/1575)
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  • 517386
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  • RIV/68081731:_____/05:00022407
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  • low energy SEM; Wien filter; CCD detector (en)
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  • [117BF376D6DF]
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  • Davos
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  • Villigen
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  • Proceedings - Microscopy Conference 2005 - Dreiländertagung /6./
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  • Horáček, Miroslav
  • Lencová, Bohumila
  • Vlček, Ivan
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issn
  • 1019-6447
number of pages
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  • Paul Scherrer Institute
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