About: Secondary Electron Contrast of doped Semiconductor Structures in SEM

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An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	V příspěvku jde o studium kontrastních mechanizmů v polovodičových strukturách s ohraničenými dopovanými oblastmi pomocí rastrovacího mikroskopu. Je zde popsán vliv uhlového rozložení emise SE a vliv množství proudu dodaného na vzorek na tvorbu kontrastu a jeho případnou inverzi. (cs) Although the dopant contrast in SEM has now been studied for more than a decade, a clear explanation of it remains a matter for the future. This study aims to examine the contrast behaviour with the emission angle and electron dose delivered to the sample. Although the dopant contrast in SEM has now been studied for more than a decade, a clear explanation of it remains a matter for the future. This study aims to examine the contrast behaviour with the emission angle and electron dose delivered to the sample. (en)
Title	Secondary Electron Contrast of doped Semiconductor Structures in SEM Secondary Electron Contrast of doped Semiconductor Structures in SEM (en) 1) Polovodičový kontrast v SE pozorovaný v SEM (cs)
skos:prefLabel	Secondary Electron Contrast of doped Semiconductor Structures in SEM Secondary Electron Contrast of doped Semiconductor Structures in SEM (en) 1) Polovodičový kontrast v SE pozorovaný v SEM (cs)
skos:notation	RIV/68081731:_____/05:00022404!RIV06-GA0-68081731
http://linked.open.../vavai/riv/strany	50
http://linked.open...avai/riv/aktivita	P
http://linked.open...avai/riv/aktivity	P(GA102/05/2327)
http://linked.open...vai/riv/dodaniDat	2006
http://linked.open...aciTvurceVysledku	Mika, Filip Frank, Luděk
http://linked.open.../riv/druhVysledku	D - Článek ve sborníku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Ústav přístrojové techniky AV ČR, v. v. i.
http://linked.open...dnocenehoVysledku	542056
http://linked.open...ai/riv/idVysledku	RIV/68081731:_____/05:00022404
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	SE contrast; 2D dopant profiling; SEM (en)
http://linked.open.../riv/klicoveSlovo	SEM 2D dopant profiling SE contrast
http://linked.open...ontrolniKodProRIV	[75CB20657F43]
http://linked.open...v/mistoKonaniAkce	Davos
http://linked.open...i/riv/mistoVydani	Villigen
http://linked.open...i/riv/nazevZdroje	Proceedings - Microscopy Conference 2005 - Dreiländertagung /6./
http://linked.open...in/vavai/riv/obor	JA
http://linked.open...ichTvurcuVysledku	2 (xsd:int)
http://linked.open...cetTvurcuVysledku	2 (xsd:int)
http://linked.open...vavai/riv/projekt	Direct imaging of the dopant distribution in a semiconductor by means of low energy clectrons
http://linked.open...UplatneniVysledku	2005
http://linked.open...iv/tvurceVysledku	Frank, Luděk Mika, Filip
http://linked.open...vavai/riv/typAkce	WRD - Světová
http://linked.open.../riv/zahajeniAkce	2005-08-28 (xsd:date)
issn	1019-6447
number of pages	1 (xsd:int)
http://purl.org/ne...btex#hasPublisher	Paul Scherrer Institute
is http://linked.open...avai/riv/vysledek of	Secondary Electron Contrast of doped Semiconductor Structures in SEM

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