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Description
  • Everhartův-Thornleyho (ET) detektor je jedním z nejčastěji používaných typů detektorů sekundárních elektronů v rastrovacím elektronovém mikroskopu (REM). Přestože celková kvalita konečného obrazu je ovlivněna všemi bloky detekční trasy, sběrová účinnost, definovaná jako poměr detekovaných sekundárních elektronů ze všech emitovaných, mění obrazový kontrast a poměr signálu k šumu. Detekční kvantová účinnost (DQE) těchto detektorů je výrazně menší než jedna. Hlavním důvodem je složité rozložení elektrostatických a magnetických polí v oblasti vzorku, které významným způsobem ovlivňují trajektorie sekundárních elektronů. (cs)
  • The Everhart-Thornley (ET) detector is the most often used type of secondary electron (SE) detector in the Scanning Electron Microscope (SEM). While the overall quality of the final image is influenced by all components of the detection channel, the collection efficiency (CE), which is defined as a ratio of collected SEs to all emitted ones, governs the image contrast and its signal to noise ratio. The detective quantum efficiency (DQE) of such detector has been found significantly below one. The main reason is in complicated distribution of electrostatic and magnetic fields in the specimen vicinity, which strongly influences the secondary electrons trajectories.
  • The Everhart-Thornley (ET) detector is the most often used type of secondary electron (SE) detector in the Scanning Electron Microscope (SEM). While the overall quality of the final image is influenced by all components of the detection channel, the collection efficiency (CE), which is defined as a ratio of collected SEs to all emitted ones, governs the image contrast and its signal to noise ratio. The detective quantum efficiency (DQE) of such detector has been found significantly below one. The main reason is in complicated distribution of electrostatic and magnetic fields in the specimen vicinity, which strongly influences the secondary electrons trajectories. (en)
Title
  • Factors affecting the Collection Efficiency of Secondary Electrons in SEM
  • Faktory ovlivňující sběrovou účinnost sekundárních elektronů v REM (cs)
  • Factors affecting the Collection Efficiency of Secondary Electrons in SEM (en)
skos:prefLabel
  • Factors affecting the Collection Efficiency of Secondary Electrons in SEM
  • Faktory ovlivňující sběrovou účinnost sekundárních elektronů v REM (cs)
  • Factors affecting the Collection Efficiency of Secondary Electrons in SEM (en)
skos:notation
  • RIV/68081731:_____/05:00022403!RIV06-AV0-68081731
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  • 48
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  • P(IAA1065304)
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  • 521330
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  • RIV/68081731:_____/05:00022403
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  • ET detector; secondary electrons; collection efficiency (en)
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  • [D5CB3704862F]
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  • Davos
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  • Proceedings - Microscopy Conference 2005 - Dreiländertagung /6./
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  • Konvalina, Ivo
  • Müllerová, Ilona
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http://linked.open.../riv/zahajeniAkce
issn
  • 1019-6447
number of pages
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  • Paul Scherrer Institute
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