| Attributes | Values |
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| rdf:type
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| Description
| - The Everhart-Thornley (ET) type detector is widely used in SEM for collection of secondary electrons (SE). At first glance the electrostatic field of the front grid, biased to a positive potential of several hundred volts, might be thought to attract all SE of kinetic energy below 50 eV or at least those emitted at 1-5 eV, i.e. near the SE spectrum peak. However, the detective quantum efficiency (DQE) of such detectors has been found significantly below one. Due to complicated distribution of electrostatic and magnetic fields around the specimen, which influence the SE trajectories, the DQE depends heavily on the collection efficiency (CE), i.e. the proportion of emitted species that impact on the detector. Preliminary simulations of electron trajectories indicated the CE values for the ET detector even below 0.1 for small working distances while more detailed results are reported here
- The Everhart-Thornley (ET) type detector is widely used in SEM for collection of secondary electrons (SE). At first glance the electrostatic field of the front grid, biased to a positive potential of several hundred volts, might be thought to attract all SE of kinetic energy below 50 eV or at least those emitted at 1-5 eV, i.e. near the SE spectrum peak. However, the detective quantum efficiency (DQE) of such detectors has been found significantly below one. Due to complicated distribution of electrostatic and magnetic fields around the specimen, which influence the SE trajectories, the DQE depends heavily on the collection efficiency (CE), i.e. the proportion of emitted species that impact on the detector. Preliminary simulations of electron trajectories indicated the CE values for the ET detector even below 0.1 for small working distances while more detailed results are reported here (en)
- Detektory Everhart-Thornley-ho typu se široce používají v REM pro sběr sekundárních elektronů (SE). Na první pohled se zdá, že elektrostatické pole na přední straně síťky, která je na kladném potenciálu několika set voltů, přitáhne všechny SE s energií pod 50 eV nebo alespoň elektrony emitované s energií 1-5 eV. Avšak zjištěná detekční kvantová účinnost (DQE) mnoha detektorů byla výrazně menší než jedna. To je způsobeno složitým rozložením elektrostatických a magnetických polí v okolí vzorku, které ovlivňují trajektorie SE. DQE silně závisí na sběrové účinnosti, což je procento emitovaných částic, které dopadnou na detektor. První simulace trajektorií elektronů naznačují hodnoty sběrové účinnosti ET detektoru dokonce menší než 0.01 při malých pracovních vzdálenostech (cs)
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| Title
| - Influence of magnetic and electrostatic fields in the specimen vicinity on trajectories of secondary electrons in SEM
- Vliv magnetického a elektrostatického pole v oblasti vzorku na trajektorie sekundárních elektronů v REM (cs)
- Influence of magnetic and electrostatic fields in the specimen vicinity on trajectories of secondary electrons in SEM (en)
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| skos:prefLabel
| - Influence of magnetic and electrostatic fields in the specimen vicinity on trajectories of secondary electrons in SEM
- Vliv magnetického a elektrostatického pole v oblasti vzorku na trajektorie sekundárních elektronů v REM (cs)
- Influence of magnetic and electrostatic fields in the specimen vicinity on trajectories of secondary electrons in SEM (en)
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| skos:notation
| - RIV/68081731:_____/04:00109103!RIV/2005/AV0/A12005/N
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| http://linked.open.../vavai/riv/strany
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| http://linked.open...avai/riv/aktivita
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| http://linked.open...avai/riv/aktivity
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| http://linked.open...vai/riv/dodaniDat
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| http://linked.open...aciTvurceVysledku
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| http://linked.open.../riv/druhVysledku
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| http://linked.open...iv/duvernostUdaju
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| http://linked.open...titaPredkladatele
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| http://linked.open...dnocenehoVysledku
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| http://linked.open...ai/riv/idVysledku
| - RIV/68081731:_____/04:00109103
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| http://linked.open...riv/jazykVysledku
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| http://linked.open.../riv/klicovaSlova
| - SEM;detective quantum efficiency;electron trajectories (en)
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| http://linked.open.../riv/klicoveSlovo
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| http://linked.open...ontrolniKodProRIV
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| http://linked.open...v/mistoKonaniAkce
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| http://linked.open...i/riv/mistoVydani
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| http://linked.open...i/riv/nazevZdroje
| - Autumn School on Materials Science and Electron Microscopy 2004 - Emerging Microscopy for Advanced Materials Development: Imaging and Spectroscopy on Atomic Scale
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| http://linked.open...in/vavai/riv/obor
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| http://linked.open...ichTvurcuVysledku
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| http://linked.open...cetTvurcuVysledku
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| http://linked.open...vavai/riv/projekt
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| http://linked.open...UplatneniVysledku
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| http://linked.open...iv/tvurceVysledku
| - Konvalina, Ivo
- Müllerová, Ilona
- Frank, Luděk
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| http://linked.open...vavai/riv/typAkce
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| http://linked.open.../riv/zahajeniAkce
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| number of pages
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| http://purl.org/ne...btex#hasPublisher
| - Humboldt University of Berlin
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