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Description
  • Za účelem sběru sekundárních elektronů (SE) jsou rastrovací elektronové mikroskopy (REM) vybaveny Everhart-Thornley-ho detektorem. Elektrostatické pole síťky na kladném potenciálu několika set voltů má přitahovat všechny SE s kinetickou energií pod 50 eV nebo alespoň ty s energií v blízkosti píku 1-3 eV ve spektru SE. Detekční kvantová účinnost (DQE) mnoha detektorů je ale výrazně menší než jedna a to je převážně dáno jejich malou sběrovou účinností. Elektrostatické pole síťky nemůže dostatečně pronikat ke vzorku a ovlivňovat trajektorie SE kvůli elektrodám na zemním potenciálu v okolí vzorku (samotný vzorek, jeho držák, stolek, pólové nástavce objektivu, atd.) (cs)
  • In order to collect the secondary electrons (SE), scanning electron microscopes (SEM) are equipped with the Everhart-Thornley (ET) type detector. The electrostatic field of the front grid, biased to a positive potential of several hundred volts , is to attract all SE of kinetic energy below 50 eV or at least those from the SE spectrum peak at 1(3 eV. However, the detection quantum efficiency (DQE) of such detectors has been found to be significantly lower than one, which is mainly given by their low collection efficiency. The electrostatic field of the grid cannot sufficiently penetrate toward the specimen and influence the trajectories of SE owing to grounded electrodes surrounding the specimen (specimen alone and its holder, specimen stage, pole piece of the objective lens, etc)
  • In order to collect the secondary electrons (SE), scanning electron microscopes (SEM) are equipped with the Everhart-Thornley (ET) type detector. The electrostatic field of the front grid, biased to a positive potential of several hundred volts , is to attract all SE of kinetic energy below 50 eV or at least those from the SE spectrum peak at 1(3 eV. However, the detection quantum efficiency (DQE) of such detectors has been found to be significantly lower than one, which is mainly given by their low collection efficiency. The electrostatic field of the grid cannot sufficiently penetrate toward the specimen and influence the trajectories of SE owing to grounded electrodes surrounding the specimen (specimen alone and its holder, specimen stage, pole piece of the objective lens, etc) (en)
Title
  • Collection Efficiency of the Detector of Secondary Electrons in SEM
  • Sběrová účinnost detektoru sekundárních elektronů v REM (cs)
  • Collection Efficiency of the Detector of Secondary Electrons in SEM (en)
skos:prefLabel
  • Collection Efficiency of the Detector of Secondary Electrons in SEM
  • Sběrová účinnost detektoru sekundárních elektronů v REM (cs)
  • Collection Efficiency of the Detector of Secondary Electrons in SEM (en)
skos:notation
  • RIV/68081731:_____/04:00109044!RIV/2005/AV0/A12005/N
http://linked.open.../vavai/riv/strany
  • 41 ; 42
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  • Z(AV0Z2065902)
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  • 558037
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  • RIV/68081731:_____/04:00109044
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  • scanning electron microscopy;collection efficiency;secondary electrons (en)
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  • [E5475A788B7D]
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  • Skalský Dvůr
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  • Brno
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  • Proceedings of the 9th International Seminar Recent Trends in Charged Particle Optics and Surface Physics Instrumentation
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  • Konvalina, Ivo
  • Müllerová, Ilona
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number of pages
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  • Ústav přístrojové techniky AV ČR
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  • 80-239-3246-2
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