About: Specimen Charging and Detection of Signal from Non-conductors in a Cathode Lens-Equipped Scanning Electron Microscope.

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About: Specimen Charging and Detection of Signal from Non-conductors in a Cathode Lens-Equipped Scanning Electron Microscope. Goto Sponge NotDistinct Permalink

An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	This paper concerns the problems connected with the observation of a nonconductive specimen in a scanning electron microscope (SEM) when incident electrons create a surface change and a corresponding electric field. The special configuration of the cathode lens enables one to control the landing energy of primary electrons via the specimen bias. In the cathode lens, the accelerating electric field at the surface of the specimen combines itself with that of the surface in influencing the trajectories of the signal electrons and hence the detected signal level and the possible recapturing of slow secondaries. Recaptured electrons reduce the ultimate positive surface potential, which arises when working below the higher critical energy of electron impact. Computer simulations of electron trajectories were performed for the typical cathode lens configuration and for a model specimen characterized by emission yields similar to those for glass. The simulations brought an extensive set of data about the traj This paper concerns the problems connected with the observation of a nonconductive specimen in a scanning electron microscope (SEM) when incident electrons create a surface change and a corresponding electric field. The special configuration of the cathode lens enables one to control the landing energy of primary electrons via the specimen bias. In the cathode lens, the accelerating electric field at the surface of the specimen combines itself with that of the surface in influencing the trajectories of the signal electrons and hence the detected signal level and the possible recapturing of slow secondaries. Recaptured electrons reduce the ultimate positive surface potential, which arises when working below the higher critical energy of electron impact. Computer simulations of electron trajectories were performed for the typical cathode lens configuration and for a model specimen characterized by emission yields similar to those for glass. The simulations brought an extensive set of data about the traj (en)
Title	Specimen Charging and Detection of Signal from Non-conductors in a Cathode Lens-Equipped Scanning Electron Microscope. Specimen Charging and Detection of Signal from Non-conductors in a Cathode Lens-Equipped Scanning Electron Microscope. (en)
skos:prefLabel	Specimen Charging and Detection of Signal from Non-conductors in a Cathode Lens-Equipped Scanning Electron Microscope. Specimen Charging and Detection of Signal from Non-conductors in a Cathode Lens-Equipped Scanning Electron Microscope. (en)
skos:notation	RIV/68081731:_____/03:12030052!RIV/2004/AV0/A12004/N
http://linked.open.../vavai/riv/strany	150 ; 156
http://linked.open...avai/riv/aktivita	P Z
http://linked.open...avai/riv/aktivity	P(IBS2065017), Z(AV0Z2065902)
http://linked.open...iv/cisloPeriodika	3
http://linked.open...vai/riv/dodaniDat	2004
http://linked.open...aciTvurceVysledku	Frank, Luděk Zobačová, Jitka
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Ústav přístrojové techniky AV ČR, v. v. i.
http://linked.open...dnocenehoVysledku	628125
http://linked.open...ai/riv/idVysledku	RIV/68081731:_____/03:12030052
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	nonconductive specimens; specimen charging; cathode lens (en)
http://linked.open.../riv/klicoveSlovo	cathode lens specimen charging nonconductive specimens
http://linked.open...odStatuVydavatele	US - Spojené státy americké
http://linked.open...ontrolniKodProRIV	[6EFFA46E121E]
http://linked.open...i/riv/nazevZdroje	Scanning
http://linked.open...in/vavai/riv/obor	JA
http://linked.open...ichTvurcuVysledku	2 (xsd:int)
http://linked.open...cetTvurcuVysledku	2 (xsd:int)
http://linked.open...ocetUcastnikuAkce	0 (xsd:int)
http://linked.open...nichUcastnikuAkce	0 (xsd:int)
http://linked.open...vavai/riv/projekt	Scanning electron microscopy of non-conductive specimens
http://linked.open...UplatneniVysledku	2003
http://linked.open...v/svazekPeriodika	25
http://linked.open...iv/tvurceVysledku	Frank, Luděk Káňová, Jitka
http://linked.open...n/vavai/riv/zamer	Rozvoj fyzikálních metod, speciálních technologií a přístrojových principů využívajících elektronových a světelných svazků a radiofrekvenční spektroskopie
issn	0161-0457
number of pages	7 (xsd:int)

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