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  • The SEM instruments, marketed at the present time, cover the range of impact energies of primary electrons down to 1 keV. Systems with compound objective lenses, containing a retarding field element, extend this range down to about 200 eV and the cathode lens (CL) equipped devices allow using arbitrarily low impact energy at acceptable resolution [1]. Consequently, the electron energy becomes a mere parameter of the SEM image and all contrast mechanisms, excited by electron impact, appear as equally available. Similarly, the strict distinguishing between kinds of information mediated by seconary (SE) and backscattered (BSE) electrons, respectively, is less relevant with novel detector principles employing acceleration of emitted electrons and conversion of accelerated signal species to slow SE. A CL equipped SEM detects SE and BSE together so that both should be always considered with any particular family of contrasts.
  • The SEM instruments, marketed at the present time, cover the range of impact energies of primary electrons down to 1 keV. Systems with compound objective lenses, containing a retarding field element, extend this range down to about 200 eV and the cathode lens (CL) equipped devices allow using arbitrarily low impact energy at acceptable resolution [1]. Consequently, the electron energy becomes a mere parameter of the SEM image and all contrast mechanisms, excited by electron impact, appear as equally available. Similarly, the strict distinguishing between kinds of information mediated by seconary (SE) and backscattered (BSE) electrons, respectively, is less relevant with novel detector principles employing acceleration of emitted electrons and conversion of accelerated signal species to slow SE. A CL equipped SEM detects SE and BSE together so that both should be always considered with any particular family of contrasts. (en)
Title
  • Contrast Mechanisms in the Scanning Low Energy Electron Microscopy.
  • Contrast Mechanisms in the Scanning Low Energy Electron Microscopy. (en)
skos:prefLabel
  • Contrast Mechanisms in the Scanning Low Energy Electron Microscopy.
  • Contrast Mechanisms in the Scanning Low Energy Electron Microscopy. (en)
skos:notation
  • RIV/68081731:_____/03:12030024!RIV/2004/AV0/A12004/N
http://linked.open.../vavai/riv/strany
  • 120 ; 121
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • P(IAA1065304), P(IPP1050128), Z(AV0Z2065902)
http://linked.open...iv/cisloPeriodika
  • Sup. 3
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 602124
http://linked.open...ai/riv/idVysledku
  • RIV/68081731:_____/03:12030024
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • scanning electron microscope; primary electrons; cathode lens (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...odStatuVydavatele
  • US - Spojené státy americké
http://linked.open...ontrolniKodProRIV
  • [262AD6C3398B]
http://linked.open...i/riv/nazevZdroje
  • Microscopy and Microanalysis
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...ocetUcastnikuAkce
http://linked.open...nichUcastnikuAkce
http://linked.open...vavai/riv/projekt
http://linked.open...UplatneniVysledku
http://linked.open...v/svazekPeriodika
  • 9
http://linked.open...iv/tvurceVysledku
  • Müllerová, Ilona
  • Frank, Luděk
http://linked.open...n/vavai/riv/zamer
issn
  • 1431-9276
number of pages
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