About: Computer Controlled Low Energy SEM.

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An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	In the last two decades the low energy range is employed in the SEM operation for many reasons that include reduced charging of non-conductive specimens, better visualisation of surface relief, larger emitted signals and, at very low energies below 100 eV, new families of image contrasts. While energy around 1 keV is available in SEM of conventional design, extension down to about 200 eV is possible by using a compound objective lens with a retarding field element and very low energies require applying the retarding field directly to the specimen surface in so-called cathode lens [1 to 4]. The cathode lens can be inserted to below the standard objective lens of SEM [3] and most efficient is to use a coaxially positioned single-crystal scintillator disc with small central hole, serving as the anode and detector simultaneously [5]. In this configuration, an arbitrary low impact energy of primary electrons is adjusted by high negative biasing of the specimen. In the last two decades the low energy range is employed in the SEM operation for many reasons that include reduced charging of non-conductive specimens, better visualisation of surface relief, larger emitted signals and, at very low energies below 100 eV, new families of image contrasts. While energy around 1 keV is available in SEM of conventional design, extension down to about 200 eV is possible by using a compound objective lens with a retarding field element and very low energies require applying the retarding field directly to the specimen surface in so-called cathode lens [1 to 4]. The cathode lens can be inserted to below the standard objective lens of SEM [3] and most efficient is to use a coaxially positioned single-crystal scintillator disc with small central hole, serving as the anode and detector simultaneously [5]. In this configuration, an arbitrary low impact energy of primary electrons is adjusted by high negative biasing of the specimen. (en)
Title	Computer Controlled Low Energy SEM. Computer Controlled Low Energy SEM. (en)
skos:prefLabel	Computer Controlled Low Energy SEM. Computer Controlled Low Energy SEM. (en)
skos:notation	RIV/68081731:_____/03:12030023!RIV/2004/AV0/A12004/N
http://linked.open.../vavai/riv/strany	116 ; 117
http://linked.open...avai/riv/aktivita	P Z
http://linked.open...avai/riv/aktivity	P(IBS2065017), Z(AV0Z2065902)
http://linked.open...iv/cisloPeriodika	Sup. 3
http://linked.open...vai/riv/dodaniDat	2004
http://linked.open...aciTvurceVysledku	Müllerová, Ilona Mika, Filip Frank, Luděk
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Ústav přístrojové techniky AV ČR, v. v. i.
http://linked.open...dnocenehoVysledku	601928
http://linked.open...ai/riv/idVysledku	RIV/68081731:_____/03:12030023
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	low energy SEM; scanning electron microscope; non-conductive specimens (en)
http://linked.open.../riv/klicoveSlovo	scanning electron microscope non-conductive specimens low energy SEM
http://linked.open...odStatuVydavatele	US - Spojené státy americké
http://linked.open...ontrolniKodProRIV	[127A5A0674FE]
http://linked.open...i/riv/nazevZdroje	Microscopy and Microanalysis
http://linked.open...in/vavai/riv/obor	JA
http://linked.open...ichTvurcuVysledku	3 (xsd:int)
http://linked.open...cetTvurcuVysledku	6 (xsd:int)
http://linked.open...ocetUcastnikuAkce	0 (xsd:int)
http://linked.open...nichUcastnikuAkce	0 (xsd:int)
http://linked.open...vavai/riv/projekt	Scanning electron microscopy of non-conductive specimens
http://linked.open...UplatneniVysledku	2003
http://linked.open...v/svazekPeriodika	9
http://linked.open...iv/tvurceVysledku	Müllerová, Ilona Frank, Luděk Mika, Filip Lopour, F. Ryšávka, J. Zadražil, M.
http://linked.open...n/vavai/riv/zamer	Rozvoj fyzikálních metod, speciálních technologií a přístrojových principů využívajících elektronových a světelných svazků a radiofrekvenční spektroskopie
issn	1431-9276
number of pages	2 (xsd:int)

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