About: Efficiency of Collection of the Secondary Electrons in SEM.

Facets (new session)
Description
Metadata
Settings
- owl:sameAs
- Inference Rule:

About: Efficiency of Collection of the Secondary Electrons in SEM. Goto Sponge NotDistinct Permalink

An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

Attributes	Values
rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	Great effort has been invested into upgrading the image resolution in SEM up to some 1nm at 15 keV. However, uncertainty still exists as regards proper appearance of even standard testing specimens. The same energy, current and impact angle of the primary beam and the same type of the secondary electron (SE) detector do not secure identical image contrast. Many details regarding generation, collection and detection of the signal species are important and a quantitative method of the detector assessment is needed. Magnetic and electrostatic fields in the specimen vicinity surely influence the SE trajectories toward detector and these fields vary with the working distance, with arrangement of grounded metallic parts in the specimen chamber, etc. The recently opened systematic study of this problem was started by examination of the collection efficiency. Great effort has been invested into upgrading the image resolution in SEM up to some 1nm at 15 keV. However, uncertainty still exists as regards proper appearance of even standard testing specimens. The same energy, current and impact angle of the primary beam and the same type of the secondary electron (SE) detector do not secure identical image contrast. Many details regarding generation, collection and detection of the signal species are important and a quantitative method of the detector assessment is needed. Magnetic and electrostatic fields in the specimen vicinity surely influence the SE trajectories toward detector and these fields vary with the working distance, with arrangement of grounded metallic parts in the specimen chamber, etc. The recently opened systematic study of this problem was started by examination of the collection efficiency. (en)
Title	Efficiency of Collection of the Secondary Electrons in SEM. Efficiency of Collection of the Secondary Electrons in SEM. (en)
skos:prefLabel	Efficiency of Collection of the Secondary Electrons in SEM. Efficiency of Collection of the Secondary Electrons in SEM. (en)
skos:notation	RIV/68081731:_____/03:12030022!RIV/2004/AV0/A12004/N
http://linked.open.../vavai/riv/strany	108 ; 109
http://linked.open...avai/riv/aktivita	Z
http://linked.open...avai/riv/aktivity	Z(AV0Z2065902)
http://linked.open...iv/cisloPeriodika	Sup. 3
http://linked.open...vai/riv/dodaniDat	2004
http://linked.open...aciTvurceVysledku	Müllerová, Ilona Konvalina, Ivo
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Ústav přístrojové techniky AV ČR, v. v. i.
http://linked.open...dnocenehoVysledku	605344
http://linked.open...ai/riv/idVysledku	RIV/68081731:_____/03:12030022
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	secondary electrons; scanning electron microscope; SE trajectories (en)
http://linked.open.../riv/klicoveSlovo	scanning electron microscope secondary electrons SE trajectories
http://linked.open...odStatuVydavatele	US - Spojené státy americké
http://linked.open...ontrolniKodProRIV	[2D5EF6F7B4CA]
http://linked.open...i/riv/nazevZdroje	Microscopy and Microanalysis
http://linked.open...in/vavai/riv/obor	JA
http://linked.open...ichTvurcuVysledku	2 (xsd:int)
http://linked.open...cetTvurcuVysledku	2 (xsd:int)
http://linked.open...ocetUcastnikuAkce	0 (xsd:int)
http://linked.open...nichUcastnikuAkce	0 (xsd:int)
http://linked.open...UplatneniVysledku	2003
http://linked.open...v/svazekPeriodika	9
http://linked.open...iv/tvurceVysledku	Konvalina, Ivo Müllerová, Ilona
http://linked.open...n/vavai/riv/zamer	Rozvoj fyzikálních metod, speciálních technologií a přístrojových principů využívajících elektronových a světelných svazků a radiofrekvenční spektroskopie
issn	1431-9276
number of pages	2 (xsd:int)

Faceted Search & Find service v1.16.118 as of Jun 21 2024

Alternative Linked Data Documents: ODE Content Formats:

RDF

ODATA

Microdata

About

OpenLink Virtuoso version 07.20.3240 as of Jun 21 2024, on Linux (x86_64-pc-linux-gnu), Single-Server Edition (126 GB total memory, 58 GB memory in use)
Data on this page belongs to its respective rights holders.
Virtuoso Faceted Browser Copyright © 2009-2024 OpenLink Software