About: Computer controlled SEM with Schottky cathode for imaging in slow and Auger electrons.

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About: Computer controlled SEM with Schottky cathode for imaging in slow and Auger electrons. Goto Sponge NotDistinct Permalink

An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	The ultrahighvacuum Scanning Electron Microscope has been built using the column of an old prototype (later produced as Tesla BS 350), some spare parts for BS 350 and new components, including computer controlled electronics. The whole vacuum system was extensively reconstructed, too. The Schottky cathode was introduced into the microscope instead of the original cold field emission gun. The advantage of this system includes a high current density, higher stability and lower vacuum demands at comparable performance as regards the resolution. Therefore it is possible to practice surface analysis with Auger electrons at a high resolution. The microscope was also adapted to the operation with slow and very slow electrons, again at high resolution, so that these two methods can be in situ compared. The ultrahighvacuum Scanning Electron Microscope has been built using the column of an old prototype (later produced as Tesla BS 350), some spare parts for BS 350 and new components, including computer controlled electronics. The whole vacuum system was extensively reconstructed, too. The Schottky cathode was introduced into the microscope instead of the original cold field emission gun. The advantage of this system includes a high current density, higher stability and lower vacuum demands at comparable performance as regards the resolution. Therefore it is possible to practice surface analysis with Auger electrons at a high resolution. The microscope was also adapted to the operation with slow and very slow electrons, again at high resolution, so that these two methods can be in situ compared. (en)
Title	Computer controlled SEM with Schottky cathode for imaging in slow and Auger electrons. Computer controlled SEM with Schottky cathode for imaging in slow and Auger electrons. (en)
skos:prefLabel	Computer controlled SEM with Schottky cathode for imaging in slow and Auger electrons. Computer controlled SEM with Schottky cathode for imaging in slow and Auger electrons. (en)
skos:notation	RIV/68081731:_____/02:12020133!RIV/2003/AV0/A12003/N
http://linked.open.../vavai/riv/strany	X1-X5
http://linked.open...avai/riv/aktivita	Z
http://linked.open...avai/riv/aktivity	Z(AV0Z2065902)
http://linked.open...vai/riv/dodaniDat	2003
http://linked.open...aciTvurceVysledku	Müllerová, Ilona Hrnčiřík, Petr
http://linked.open.../riv/druhVysledku	D - Článek ve sborníku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Ústav přístrojové techniky AV ČR, v. v. i.
http://linked.open...dnocenehoVysledku	641480
http://linked.open...ai/riv/idVysledku	RIV/68081731:_____/02:12020133
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	ultrahighvacuum; scanning electron microscope; surface analysis (en)
http://linked.open.../riv/klicoveSlovo	surface analysis scanning electron microscope ultrahighvacuum
http://linked.open...ontrolniKodProRIV	[32E0914E5E04]
http://linked.open...v/mistoKonaniAkce	Brno [CZ]
http://linked.open...i/riv/mistoVydani	Brno
http://linked.open...i/riv/nazevZdroje	Proceedings of 8.sup.th./sup. conference EEICT 2002.
http://linked.open...in/vavai/riv/obor	JA
http://linked.open...ichTvurcuVysledku	2 (xsd:int)
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http://linked.open...nichUcastnikuAkce	0 (xsd:int)
http://linked.open...UplatneniVysledku	2002
http://linked.open...iv/tvurceVysledku	Müllerová, Ilona Hrnčiřík, Petr
http://linked.open...vavai/riv/typAkce	EUR - Evropská
http://linked.open.../riv/zahajeniAkce	2002-04-25 (xsd:date)
http://linked.open...n/vavai/riv/zamer	Rozvoj fyzikálních metod, speciálních technologií a přístrojových principů využívajících elektronových a světelných svazků a radiofrekvenční spektroskopie
number of pages	5 (xsd:int)
http://purl.org/ne...btex#hasPublisher	Vysoké učení technické v Brně. Fakulta elektrotechniky a komunikačních technologií

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