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  • Scanning electron imaging of plan views of boron-doped patterns in silicon is examined, together with the mechanism of formation of the electronic contrast in this kind of structures. Main to-date published results are critically reviewed and new data are presented concerning the secondary, backscattered and total-emission electron contrasts, including their qualitative and quantitative behaviour, particularly in the low energy range achieved with the help of the cathode lens (the scanning low energy electron microscopy mode, SLEEM).
  • Scanning electron imaging of plan views of boron-doped patterns in silicon is examined, together with the mechanism of formation of the electronic contrast in this kind of structures. Main to-date published results are critically reviewed and new data are presented concerning the secondary, backscattered and total-emission electron contrasts, including their qualitative and quantitative behaviour, particularly in the low energy range achieved with the help of the cathode lens (the scanning low energy electron microscopy mode, SLEEM). (en)
Title
  • Imaging of the boron doping in silicon using low energy SEM.
  • Imaging of the boron doping in silicon using low energy SEM. (en)
skos:prefLabel
  • Imaging of the boron doping in silicon using low energy SEM.
  • Imaging of the boron doping in silicon using low energy SEM. (en)
skos:notation
  • RIV/68081731:_____/02:12020118!RIV/2003/AV0/A12003/N
http://linked.open.../vavai/riv/strany
  • 223 ; 243
http://linked.open...avai/riv/aktivita
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  • P(IAA1065901), P(IBS2065017), Z(AV0Z2065902)
http://linked.open...iv/cisloPeriodika
  • 3/4
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  • 648377
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  • RIV/68081731:_____/02:12020118
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  • electron and ion microscopes; semiconductor doping (en)
http://linked.open.../riv/klicoveSlovo
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  • NL - Nizozemsko
http://linked.open...ontrolniKodProRIV
  • [414BC8CF9F22]
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  • Ultramicroscopy
http://linked.open...in/vavai/riv/obor
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http://linked.open...v/svazekPeriodika
  • 93
http://linked.open...iv/tvurceVysledku
  • Müllerová, Ilona
  • Frank, Luděk
  • El-Gomati, M.
http://linked.open...n/vavai/riv/zamer
issn
  • 0304-3991
number of pages
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