About: Visualization of the Energy Band Contrast in SEM Scanning Electron Microscopy Through Low-energy Electron Reflectance.

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About: Visualization of the Energy Band Contrast in SEM Scanning Electron Microscopy Through Low-energy Electron Reflectance. Goto Sponge NotDistinct Permalink

An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

Attributes	Values
rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	Technological development and detection of defects for modern large integration semiconductor devices require the use of high-resolution visualization of topology of differently doped areas doping profiles. In order to restrict the radiation damaged area to the shallowest surface, and also to decrease the energy delivered, low-energy electrons should be used for this purpose. Technological development and detection of defects for modern large integration semiconductor devices require the use of high-resolution visualization of topology of differently doped areas doping profiles. In order to restrict the radiation damaged area to the shallowest surface, and also to decrease the energy delivered, low-energy electrons should be used for this purpose. (en)
Title	Visualization of the Energy Band Contrast in SEM Scanning Electron Microscopy Through Low-energy Electron Reflectance. Visualization of the Energy Band Contrast in SEM Scanning Electron Microscopy Through Low-energy Electron Reflectance. (en)
skos:prefLabel	Visualization of the Energy Band Contrast in SEM Scanning Electron Microscopy Through Low-energy Electron Reflectance. Visualization of the Energy Band Contrast in SEM Scanning Electron Microscopy Through Low-energy Electron Reflectance. (en)
skos:notation	RIV/68081731:_____/01:12010037!RIV/2003/AV0/A12003/N
http://linked.open.../vavai/riv/strany	115
http://linked.open...avai/riv/aktivita	Z
http://linked.open...avai/riv/aktivity	Z(AV0Z2065902)
http://linked.open...iv/cisloPeriodika	6
http://linked.open...vai/riv/dodaniDat	2003
http://linked.open...aciTvurceVysledku	Müllerová, Ilona Hutař, Otakar Frank, Luděk
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Ústav přístrojové techniky AV ČR, v. v. i.
http://linked.open...dnocenehoVysledku	700362
http://linked.open...ai/riv/idVysledku	RIV/68081731:_____/01:12010037
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	low-energy electrons (en)
http://linked.open.../riv/klicoveSlovo	low-energy electrons
http://linked.open...odStatuVydavatele	US - Spojené státy americké
http://linked.open...ontrolniKodProRIV	[9BD43716615D]
http://linked.open...i/riv/nazevZdroje	Scanning
http://linked.open...in/vavai/riv/obor	JA
http://linked.open...ichTvurcuVysledku	3 (xsd:int)
http://linked.open...cetTvurcuVysledku	3 (xsd:int)
http://linked.open...ocetUcastnikuAkce	0 (xsd:int)
http://linked.open...nichUcastnikuAkce	0 (xsd:int)
http://linked.open...UplatneniVysledku	2001
http://linked.open...v/svazekPeriodika	23
http://linked.open...iv/tvurceVysledku	Müllerová, Ilona Frank, Luděk Hutař, Otakar
http://linked.open...n/vavai/riv/zamer	Rozvoj fyzikálních metod, speciálních technologií a přístrojových principů využívajících elektronových a světelných svazků a radiofrekvenční spektroskopie
issn	0161-0457
number of pages	1 (xsd:int)

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