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Description
  • The low energy backscattered electron (BSE) detector, equipped with an electrostatic immersion lens for the retardation of the primary electron beam (PE) was elaborated and used for the imaging of surface semiconductor device specimens in a commercial SEM. Despite the signal of BSE is generally lower than that obtained using secondary electrons (SE), the achieved results predestine this BSE detection method as a suitable tool for the inspection of fine structures of semiconductor devices and linewidth measurements of critical dimensions (CD).
  • The low energy backscattered electron (BSE) detector, equipped with an electrostatic immersion lens for the retardation of the primary electron beam (PE) was elaborated and used for the imaging of surface semiconductor device specimens in a commercial SEM. Despite the signal of BSE is generally lower than that obtained using secondary electrons (SE), the achieved results predestine this BSE detection method as a suitable tool for the inspection of fine structures of semiconductor devices and linewidth measurements of critical dimensions (CD). (en)
Title
  • Application of low-energy backscattered electron detection in the inspection of semiconductor devices technology.
  • Application of low-energy backscattered electron detection in the inspection of semiconductor devices technology. (en)
skos:prefLabel
  • Application of low-energy backscattered electron detection in the inspection of semiconductor devices technology.
  • Application of low-energy backscattered electron detection in the inspection of semiconductor devices technology. (en)
skos:notation
  • RIV/68081731:_____/00:12000101!RIV/2003/AV0/A12003/N
http://linked.open.../vavai/riv/strany
  • 271;272
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • P(IBS2065017), Z(AV0Z2065902)
http://linked.open...iv/cisloPeriodika
  • 10
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
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  • 705011
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  • RIV/68081731:_____/00:12000101
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  • N/A (en)
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  • CZ - Česká republika
http://linked.open...ontrolniKodProRIV
  • [107E84DFCF1B]
http://linked.open...i/riv/nazevZdroje
  • Jemná mechanika a optika
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
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http://linked.open...ocetUcastnikuAkce
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http://linked.open...vavai/riv/projekt
http://linked.open...UplatneniVysledku
http://linked.open...v/svazekPeriodika
  • 45
http://linked.open...iv/tvurceVysledku
  • Oral, Martin
  • Müllerová, Ilona
  • Hutař, Otakar
  • Romanovský, Vladimír
http://linked.open...n/vavai/riv/zamer
issn
  • 0447-6441
number of pages
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