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Description
  • The charging effects are encountered very often when the semiconductor specimens are observed. There are several possibilities how to eliminate these undesirable phenomena. One of the newest methods how to suppress charging of specimens is environmental scanning electron microscopy (ESEM). Ionization of gas molecules caused by impacts of primary beam electrons and signal electrons in the close vicinity of the specimen surface removes the surface charge. The ionization detectors used in ESEM enable one to obtain similar information as in classical SEM.
  • The charging effects are encountered very often when the semiconductor specimens are observed. There are several possibilities how to eliminate these undesirable phenomena. One of the newest methods how to suppress charging of specimens is environmental scanning electron microscopy (ESEM). Ionization of gas molecules caused by impacts of primary beam electrons and signal electrons in the close vicinity of the specimen surface removes the surface charge. The ionization detectors used in ESEM enable one to obtain similar information as in classical SEM. (en)
Title
  • Imaging of semiconductor structures in environmental SEM.
  • Imaging of semiconductor structures in environmental SEM. (en)
skos:prefLabel
  • Imaging of semiconductor structures in environmental SEM.
  • Imaging of semiconductor structures in environmental SEM. (en)
skos:notation
  • RIV/68081731:_____/00:12000100!RIV/2003/AV0/A12003/N
http://linked.open.../vavai/riv/strany
  • 274;275
http://linked.open...avai/riv/aktivita
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  • P(IBS2065017), Z(AV0Z2065902)
http://linked.open...iv/cisloPeriodika
  • 10
http://linked.open...vai/riv/dodaniDat
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  • 713145
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  • RIV/68081731:_____/00:12000100
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  • N/A (en)
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  • CZ - Česká republika
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  • [42D89670F1E7]
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  • Jemná mechanika a optika
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http://linked.open...ichTvurcuVysledku
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http://linked.open...vavai/riv/projekt
http://linked.open...UplatneniVysledku
http://linked.open...v/svazekPeriodika
  • 45
http://linked.open...iv/tvurceVysledku
  • Hutař, Otakar
  • Romanovský, Vladimír
http://linked.open...n/vavai/riv/zamer
issn
  • 0447-6441
number of pages
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