About: Detection of low energy backscattered electrons for the study of material contrast in SEM.

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About: Detection of low energy backscattered electrons for the study of material contrast in SEM. Goto Sponge NotDistinct Permalink

An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

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Description	Problem of the low material contrast recorded by means of low energy (1 keV) backscattered electrons in SEM is described. Other advantages of low energy backscatterd electrons are discussed. A very efficient low voltage YAG-BSE detector has been developed and used for the imaging of the specimen surfaces with a high resolution. Problem of the low material contrast recorded by means of low energy (1 keV) backscattered electrons in SEM is described. Other advantages of low energy backscatterd electrons are discussed. A very efficient low voltage YAG-BSE detector has been developed and used for the imaging of the specimen surfaces with a high resolution. (en)
Title	Detection of low energy backscattered electrons for the study of material contrast in SEM. Detection of low energy backscattered electrons for the study of material contrast in SEM. (en)
skos:prefLabel	Detection of low energy backscattered electrons for the study of material contrast in SEM. Detection of low energy backscattered electrons for the study of material contrast in SEM. (en)
skos:notation	RIV/68081731:_____/00:12000076!RIV/2003/AV0/A12003/N
http://linked.open.../vavai/riv/strany	17;18
http://linked.open...avai/riv/aktivita	Z
http://linked.open...avai/riv/aktivity	Z(AV0Z2065902)
http://linked.open...vai/riv/dodaniDat	2003
http://linked.open...aciTvurceVysledku	Autrata, Rudolf
http://linked.open.../riv/druhVysledku	D - Článek ve sborníku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Ústav přístrojové techniky AV ČR, v. v. i.
http://linked.open...dnocenehoVysledku	708371
http://linked.open...ai/riv/idVysledku	RIV/68081731:_____/00:12000076
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	N/A (en)
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http://linked.open...ontrolniKodProRIV	[01F00675D5F7]
http://linked.open...v/mistoKonaniAkce	Zakopane [PL]
http://linked.open...i/riv/mistoVydani	Krakow
http://linked.open...i/riv/nazevZdroje	Proceedings of 3rd Japanese.Polish Joint Seminar on Material Analysis.
http://linked.open...in/vavai/riv/obor	JA
http://linked.open...ichTvurcuVysledku	1 (xsd:int)
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http://linked.open...UplatneniVysledku	2000
http://linked.open...iv/tvurceVysledku	Autrata, Rudolf
http://linked.open...vavai/riv/typAkce	WRD - Světová
http://linked.open.../riv/zahajeniAkce	2000-07-16 (xsd:date)
http://linked.open...n/vavai/riv/zamer	Rozvoj fyzikálních metod, speciálních technologií a přístrojových principů využívajících elektronových a světelných svazků a radiofrekvenční spektroskopie
number of pages	2 (xsd:int)
http://purl.org/ne...btex#hasPublisher	Instytut Metalurgii i Inżynierii Materiałowej im. Aleksandra Krupkowskiego Polskiej Akademii Nauk

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