About: Test Specimens for SEM.

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An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	In most applications SEM devices are utilized in the area of magnification quite far from the high limit. For such cases we prepare objects interesting for SEM by using special techniques of microfabrication. Those objects can be called test patterns. Compared with natural objects, they have an advantage: their geometry and dimensions are determined with high precision. Another advantage may be that the test pattern can be created from materials with well known properties. In our laboratories we prepare test specimens using electron-beam lithography and the anisotropic etching of silicon and using holographic techniques. We have designed the topography of anisotropically etched measuring test specimen '.mu.-scale'.In most applications SEM devices are utilized in the area of magnification quite far from the high limit. For such cases we prepare objects interesting for SEM by using special techniques of microfabrication. Those objects can be called test patterns. Compared with natural objects, they have In most applications SEM devices are utilized in the area of magnification quite far from the high limit. For such cases we prepare objects interesting for SEM by using special techniques of microfabrication. Those objects can be called test patterns. Compared with natural objects, they have an advantage: their geometry and dimensions are determined with high precision. Another advantage may be that the test pattern can be created from materials with well known properties. In our laboratories we prepare test specimens using electron-beam lithography and the anisotropic etching of silicon and using holographic techniques. We have designed the topography of anisotropically etched measuring test specimen '.mu.-scale'.In most applications SEM devices are utilized in the area of magnification quite far from the high limit. For such cases we prepare objects interesting for SEM by using special techniques of microfabrication. Those objects can be called test patterns. Compared with natural objects, they have (en)
Title	Test Specimens for SEM. Test Specimens for SEM. (en)
skos:prefLabel	Test Specimens for SEM. Test Specimens for SEM. (en)
skos:notation	RIV/68081731:_____/00:12000028!RIV/2003/AV0/A12003/N
http://linked.open.../vavai/riv/strany	I445;I446
http://linked.open...avai/riv/aktivita	P Z
http://linked.open...avai/riv/aktivity	P(IBS2065014), Z(AV0Z2065902)
http://linked.open...vai/riv/dodaniDat	2003
http://linked.open...aciTvurceVysledku	Matějka, František
http://linked.open.../riv/druhVysledku	D - Článek ve sborníku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Ústav přístrojové techniky AV ČR, v. v. i.
http://linked.open...dnocenehoVysledku	729139
http://linked.open...ai/riv/idVysledku	RIV/68081731:_____/00:12000028
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	N/A (en)
http://linked.open.../riv/klicoveSlovo	N/A
http://linked.open...ontrolniKodProRIV	[F17D23109154]
http://linked.open...v/mistoKonaniAkce	Brno [CZ]
http://linked.open...i/riv/mistoVydani	Brno
http://linked.open...i/riv/nazevZdroje	Proceedings of the 12th European Congress on Electron Microscopy.
http://linked.open...in/vavai/riv/obor	JA
http://linked.open...ichTvurcuVysledku	1 (xsd:int)
http://linked.open...cetTvurcuVysledku	2 (xsd:int)
http://linked.open...ocetUcastnikuAkce	0 (xsd:int)
http://linked.open...nichUcastnikuAkce	0 (xsd:int)
http://linked.open...vavai/riv/projekt	Submicrometer relief diffractive structures made by electron-beam lithography.
http://linked.open...UplatneniVysledku	2000
http://linked.open...iv/tvurceVysledku	Matějka, František Ryzí, Z.
http://linked.open...vavai/riv/typAkce	WRD - Světová
http://linked.open.../riv/zahajeniAkce	2000-07-09 (xsd:date)
http://linked.open...n/vavai/riv/zamer	Rozvoj fyzikálních metod, speciálních technologií a přístrojových principů využívajících elektronových a světelných svazků a radiofrekvenční spektroskopie
number of pages	2 (xsd:int)
http://purl.org/ne...btex#hasPublisher	Czechoslovak Society for Electron Microscopy
https://schema.org/isbn	80-238-5503-4

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