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  • The charging effects are encountered very often when the semiconductor specimens are observed. There are several possibilities how to eliminate these undesirable phenomena. One of the newest methods how to suppress charging of specimens is environmental scanning electron microscopy (ESEM). Ionisation of gas molecules caused by impacts of primary beam electrons and signal electrons in the close vicinity of the specimen surface removes the surface charge. The ionisation detectors used in ESEM enable one to obtain similar information as in classical SEM.
  • The charging effects are encountered very often when the semiconductor specimens are observed. There are several possibilities how to eliminate these undesirable phenomena. One of the newest methods how to suppress charging of specimens is environmental scanning electron microscopy (ESEM). Ionisation of gas molecules caused by impacts of primary beam electrons and signal electrons in the close vicinity of the specimen surface removes the surface charge. The ionisation detectors used in ESEM enable one to obtain similar information as in classical SEM. (en)
Title
  • Imaging of semiconductor structures in environmental SEM.
  • Imaging of semiconductor structures in environmental SEM. (en)
skos:prefLabel
  • Imaging of semiconductor structures in environmental SEM.
  • Imaging of semiconductor structures in environmental SEM. (en)
skos:notation
  • RIV/68081731:_____/00:12000026!RIV/2003/AV0/A12003/N
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  • I243;I244
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  • P(IBS2065017), Z(AV0Z2065902)
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  • 713146
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  • RIV/68081731:_____/00:12000026
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  • N/A (en)
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  • [D61341E4F468]
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  • Brno [CZ]
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  • Brno
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  • Proceedings of the 12th European Congress on Electron Microscopy.
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  • Hutař, Otakar
  • Romanovský, Vladimír
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number of pages
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  • Czechoslovak Society for Electron Microscopy
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  • 80-238-5503-4
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