About: Dimension measurement in a cathode lens equipped low-energy SEM.     Goto   Sponge   NotDistinct   Permalink

An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

AttributesValues
rdf:type
Description
  • The paper deals with calibration of magnification in a cathode lens equipped SEM, which provides a high resolution in the energy range below 2000 eV, where both the charging-up and edge effect phenomena, complicating the measurement of dimensions, are suppressed. An analytical expression for the image magnification, in the dependence on the electron impact energy and the working distance, is derived and verified with respect to the measured values. Finally, a procedure suitable for the routine calibration is proposed.
  • The paper deals with calibration of magnification in a cathode lens equipped SEM, which provides a high resolution in the energy range below 2000 eV, where both the charging-up and edge effect phenomena, complicating the measurement of dimensions, are suppressed. An analytical expression for the image magnification, in the dependence on the electron impact energy and the working distance, is derived and verified with respect to the measured values. Finally, a procedure suitable for the routine calibration is proposed. (en)
Title
  • Dimension measurement in a cathode lens equipped low-energy SEM.
  • Dimension measurement in a cathode lens equipped low-energy SEM. (en)
skos:prefLabel
  • Dimension measurement in a cathode lens equipped low-energy SEM.
  • Dimension measurement in a cathode lens equipped low-energy SEM. (en)
skos:notation
  • RIV/68081731:_____/00:12000015!RIV/2003/AV0/A12003/N
http://linked.open.../vavai/riv/strany
  • I199;I200
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • P(IBS2065017), Z(AV0Z2065902)
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 708841
http://linked.open...ai/riv/idVysledku
  • RIV/68081731:_____/00:12000015
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • N/A (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...ontrolniKodProRIV
  • [F6420539CF4B]
http://linked.open...v/mistoKonaniAkce
  • Brno [CZ]
http://linked.open...i/riv/mistoVydani
  • Brno
http://linked.open...i/riv/nazevZdroje
  • Proceedings of the 12th European Congress on Electron Microscopy.
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...ocetUcastnikuAkce
http://linked.open...nichUcastnikuAkce
http://linked.open...vavai/riv/projekt
http://linked.open...UplatneniVysledku
http://linked.open...iv/tvurceVysledku
  • Oral, Martin
  • Müllerová, Ilona
  • Frank, Luděk
  • Hutař, Otakar
http://linked.open...vavai/riv/typAkce
http://linked.open.../riv/zahajeniAkce
http://linked.open...n/vavai/riv/zamer
number of pages
http://purl.org/ne...btex#hasPublisher
  • Czechoslovak Society for Electron Microscopy
https://schema.org/isbn
  • 80-238-5503-4
Faceted Search & Find service v1.16.118 as of Jun 21 2024


Alternative Linked Data Documents: ODE     Content Formats:   [cxml] [csv]     RDF   [text] [turtle] [ld+json] [rdf+json] [rdf+xml]     ODATA   [atom+xml] [odata+json]     Microdata   [microdata+json] [html]    About   
This material is Open Knowledge   W3C Semantic Web Technology [RDF Data] Valid XHTML + RDFa
OpenLink Virtuoso version 07.20.3240 as of Jun 21 2024, on Linux (x86_64-pc-linux-gnu), Single-Server Edition (126 GB total memory, 58 GB memory in use)
Data on this page belongs to its respective rights holders.
Virtuoso Faceted Browser Copyright © 2009-2024 OpenLink Software