About: TEM study of nanocomposite TiC/a-C:H coating prepared by balanced magnetron sputtering

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About: TEM study of nanocomposite TiC/a-C:H coating prepared by balanced magnetron sputtering Goto Sponge NotDistinct Permalink

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Description	Composites have often desirable combinations of properties that are not found in the individual components. Nanocrastaline titanium carbide embedded in an hydrogenated amorphous carbon matrix (nc-TiC/a-C:H) shows high hardness and Young's modulus together with low wear and low friction coefficient . These coatings are usually deposited by the hybrid PVD-PECVD process using the unbalanced of even the close-field unbalanced magnetic field configuration in order to enhance the ion bombardment of the growing film. The thickness of these coatings ranges typically from several hundreds of nm up to 3µm. The aim of the recent work was to prepare well adherent nc- TiC/a -C:H coatings about 5µm thick on various substrates using a well balanced magnetic field configuration and only very low power RF bias on the substrate. Composites have often desirable combinations of properties that are not found in the individual components. Nanocrastaline titanium carbide embedded in an hydrogenated amorphous carbon matrix (nc-TiC/a-C:H) shows high hardness and Young's modulus together with low wear and low friction coefficient . These coatings are usually deposited by the hybrid PVD-PECVD process using the unbalanced of even the close-field unbalanced magnetic field configuration in order to enhance the ion bombardment of the growing film. The thickness of these coatings ranges typically from several hundreds of nm up to 3µm. The aim of the recent work was to prepare well adherent nc- TiC/a -C:H coatings about 5µm thick on various substrates using a well balanced magnetic field configuration and only very low power RF bias on the substrate. (en)
Title	TEM study of nanocomposite TiC/a-C:H coating prepared by balanced magnetron sputtering TEM study of nanocomposite TiC/a-C:H coating prepared by balanced magnetron sputtering (en)
skos:prefLabel	TEM study of nanocomposite TiC/a-C:H coating prepared by balanced magnetron sputtering TEM study of nanocomposite TiC/a-C:H coating prepared by balanced magnetron sputtering (en)
skos:notation	RIV/68081723:_____/11:00370065!RIV12-AV0-68081723
http://linked.open...avai/predkladatel	Ústav fyziky materiálů AVČR, v.v.i.
http://linked.open...avai/riv/aktivita	Z
http://linked.open...avai/riv/aktivity	Z(AV0Z20410507)
http://linked.open...vai/riv/dodaniDat	2012
http://linked.open...aciTvurceVysledku	Buršík, Jiří
http://linked.open.../riv/druhVysledku	O - Ostatní výsledky nezařaditelné do žádného z výše uvedených druhů výsledku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Ústav fyziky materiálů AV ČR, v. v. i.
http://linked.open...dnocenehoVysledku	234575
http://linked.open...ai/riv/idVysledku	RIV/68081723:_____/11:00370065
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	nanocomposite; PVD; machanical properties (en)
http://linked.open.../riv/klicoveSlovo	nanocomposite machanical properties PVD
http://linked.open...ontrolniKodProRIV	[F8EEF27A805E]
http://linked.open...in/vavai/riv/obor	BM
http://linked.open...ichTvurcuVysledku	1 (xsd:int)
http://linked.open...cetTvurcuVysledku	7 (xsd:int)
http://linked.open...UplatneniVysledku	2011
http://linked.open...iv/tvurceVysledku	Buršík, Jiří Buršíková, V. Jílek, M. Souček, P. Vašina, P. Caha, O. Zábranský, L.
http://linked.open...n/vavai/riv/zamer	Physical properties of advanced materials in relation to their microstructure and processing

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