About: TEM study of oxide precipitates and other microstructural defects in Czochralski-grown silicon after various heat treatments     Goto   Sponge   NotDistinct   Permalink

An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

AttributesValues
rdf:type
Description
  • A detailed modelling of the defect nucleation and growth in Si wafers is complicated due to a large number of process parameters along the production path. That is why experimental data obtained using various methods are needed to achieve more realistic models and outputs. As a part of a complex study of nucleation and growth of oxygen precipitates Czochralski-grown silicon crystals, this paper reports our latest results obtained by TEM. Among other experimental methods such as IR absorption or X-ray diffraction, TEM is irreplaceable in the direct visualization and characterization of precipitates and associated deffects.
  • A detailed modelling of the defect nucleation and growth in Si wafers is complicated due to a large number of process parameters along the production path. That is why experimental data obtained using various methods are needed to achieve more realistic models and outputs. As a part of a complex study of nucleation and growth of oxygen precipitates Czochralski-grown silicon crystals, this paper reports our latest results obtained by TEM. Among other experimental methods such as IR absorption or X-ray diffraction, TEM is irreplaceable in the direct visualization and characterization of precipitates and associated deffects. (en)
Title
  • TEM study of oxide precipitates and other microstructural defects in Czochralski-grown silicon after various heat treatments
  • TEM study of oxide precipitates and other microstructural defects in Czochralski-grown silicon after various heat treatments (en)
skos:prefLabel
  • TEM study of oxide precipitates and other microstructural defects in Czochralski-grown silicon after various heat treatments
  • TEM study of oxide precipitates and other microstructural defects in Czochralski-grown silicon after various heat treatments (en)
skos:notation
  • RIV/68081723:_____/11:00370027!RIV12-AV0-68081723
http://linked.open...avai/predkladatel
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • Z(AV0Z20410507)
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 234576
http://linked.open...ai/riv/idVysledku
  • RIV/68081723:_____/11:00370027
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • Czochralski silicon; oxide; precipitate (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...ontrolniKodProRIV
  • [0CD67D3E31B2]
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...UplatneniVysledku
http://linked.open...iv/tvurceVysledku
  • Buršík, Jiří
  • Svoboda, Milan
  • Caha, O.
  • Meduňa, M.
  • Růžička, J.
http://linked.open...n/vavai/riv/zamer
Faceted Search & Find service v1.16.118 as of Jun 21 2024


Alternative Linked Data Documents: ODE     Content Formats:   [cxml] [csv]     RDF   [text] [turtle] [ld+json] [rdf+json] [rdf+xml]     ODATA   [atom+xml] [odata+json]     Microdata   [microdata+json] [html]    About   
This material is Open Knowledge   W3C Semantic Web Technology [RDF Data] Valid XHTML + RDFa
OpenLink Virtuoso version 07.20.3240 as of Jun 21 2024, on Linux (x86_64-pc-linux-gnu), Single-Server Edition (126 GB total memory, 58 GB memory in use)
Data on this page belongs to its respective rights holders.
Virtuoso Faceted Browser Copyright © 2009-2024 OpenLink Software