About: Photolithographic technique for controlled fabrication of metal structures

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An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
rdfs:seeAlso	http://hdl.handle.net/11104/0215413
Description	We are describing two strategies for controlled (geometry and dimension) preparation of metal micro-nano structures. Both techniques are based on photolithographic processes with selective pattern transfer. First technique utilizes agarose gel containing photosensitive silver chloride as the photosensitive layer. Silver structures are formed after irradiation of the gel through the photolithographic mask which defines shape of the resulting structures. Second approach utilizes photolithographic process to form particles from vacuum deposited thin metal layer deposited over soluble sacrificial layer. We are describing two strategies for controlled (geometry and dimension) preparation of metal micro-nano structures. Both techniques are based on photolithographic processes with selective pattern transfer. First technique utilizes agarose gel containing photosensitive silver chloride as the photosensitive layer. Silver structures are formed after irradiation of the gel through the photolithographic mask which defines shape of the resulting structures. Second approach utilizes photolithographic process to form particles from vacuum deposited thin metal layer deposited over soluble sacrificial layer. (en)
Title	Photolithographic technique for controlled fabrication of metal structures Photolithographic technique for controlled fabrication of metal structures (en)
skos:prefLabel	Photolithographic technique for controlled fabrication of metal structures Photolithographic technique for controlled fabrication of metal structures (en)
skos:notation	RIV/68081715:_____/12:00386193!RIV13-AV0-68081715
http://linked.open...avai/predkladatel	Ústav analytické chemie AV ČR, v. v. i.
http://linked.open...avai/riv/aktivita	I P
http://linked.open...avai/riv/aktivity	I, P(GAP301/11/2055), P(GBP206/12/G014)
http://linked.open...vai/riv/dodaniDat	2013
http://linked.open...aciTvurceVysledku	Jusková, Petra Foret, František Hegrová, Jitka
http://linked.open.../riv/druhVysledku	D - Článek ve sborníku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Ústav analytické chemie AV ČR, v. v. i.
http://linked.open...dnocenehoVysledku	158563
http://linked.open...ai/riv/idVysledku	RIV/68081715:_____/12:00386193
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	metal microstructures; microfabrication; photolithography (en)
http://linked.open.../riv/klicoveSlovo	microfabrication metal microstructures photolithography
http://linked.open...ontrolniKodProRIV	[881342F832B0]
http://linked.open...v/mistoKonaniAkce	Brno
http://linked.open...i/riv/mistoVydani	Brno
http://linked.open...i/riv/nazevZdroje	CECE 2012. 9th International Interdisciplinary Meeting on Bioanalysis
http://linked.open...in/vavai/riv/obor	CB
http://linked.open...ichTvurcuVysledku	3 (xsd:int)
http://linked.open...cetTvurcuVysledku	3 (xsd:int)
http://linked.open...vavai/riv/projekt	New methods of analysis of proteins and their glycosylation in cancer - combination of electrochemistry, microfludic biosensors and mass spectrometry. Center for advanced bioanalytical technologies
http://linked.open...UplatneniVysledku	2012
http://linked.open...iv/tvurceVysledku	Foret, František Jusková, Petra Hegrová, Jitka
http://linked.open...vavai/riv/typAkce	WRD - Světová
http://linked.open.../riv/zahajeniAkce	2012-11-01 (xsd:date)
number of pages	4 (xsd:int)
http://purl.org/ne...btex#hasPublisher	Ústav analytické chemie AV ČR, v. v. i
https://schema.org/isbn	978-80-904959-1-3
is http://linked.open...avai/riv/vysledek of	Photolithographic technique for controlled fabrication of metal structures

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