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  • Úprava elipsometru Gaertner L119 a jeho použití pro studium tenkých vrstev
  • Úprava elipsometru Gaertner L119 a jeho použití pro studium tenkých vrstev (cs)
  • This article deals with modification and renovation of the ellipsometer Gaertner L119 and its using for thin-film structures study. The measurement process is fully automatized. The device works at constant wavelength in PCSA null regime and the data are obtained for various angles of incidence. The system was tested on a set of SiO2 thin-films prepared on Si single crystal wafers by thermal oxidation at 1200°C. The thicknesses obtained from experiment were compared with the results obtained by using of Yamaguchi type spectral ellipsometric system as well as with the data determined from white-light interferometry and spectral reflectometry. (en)
Title
  • Úprava elipsometru Gaertner L119 a jeho použití pro studium tenkých vrstev
  • The modification of Gaertner L119 ellipsometer and its use for thin-film structures study (en)
  • Úprava elipsometru Gaertner L119 a jeho použití pro studium tenkých vrstev (cs)
skos:prefLabel
  • Úprava elipsometru Gaertner L119 a jeho použití pro studium tenkých vrstev
  • The modification of Gaertner L119 ellipsometer and its use for thin-film structures study (en)
  • Úprava elipsometru Gaertner L119 a jeho použití pro studium tenkých vrstev (cs)
skos:notation
  • RIV/61989100:27350/07:00016591!RIV08-GA0-27350___
http://linked.open.../vavai/riv/strany
  • 40-42
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • P(GA202/06/0531), Z(MSM6198910016)
http://linked.open...iv/cisloPeriodika
  • 2
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 456759
http://linked.open...ai/riv/idVysledku
  • RIV/61989100:27350/07:00016591
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • Ellipsometry; thin films (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...odStatuVydavatele
  • CZ - Česká republika
http://linked.open...ontrolniKodProRIV
  • [11EB72336B82]
http://linked.open...i/riv/nazevZdroje
  • Fine Mechanics and Optics - Jemná mechanika a optika
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...vavai/riv/projekt
http://linked.open...UplatneniVysledku
http://linked.open...v/svazekPeriodika
  • 52
http://linked.open...iv/tvurceVysledku
  • Hlubina, Petr
  • Pištora, Jaromír
  • Luňáček, Jiří
  • Lesňák, Michal
  • Talik, Adam
http://linked.open...n/vavai/riv/zamer
issn
  • 0447-6441
number of pages
http://localhost/t...ganizacniJednotka
  • 27350
is http://linked.open...avai/riv/vysledek of
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