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Description
  • Modelování 2D mnohovrstvých mřížek se superdlouhou periodou aplikovaného ve spektrální elipsometrii (cs)
  • Dispersion of ellipsometrical angles analyzed using theoretical model as well as over measured data is presented. Binary multilayer grating is modeled via rigorous coupled wave method. The special attention is devoted to additional oxidation of inter-dot area and to an interaction of finite optical beam with super-long-period structure. The results are discussed in the relation to experimental data.
  • Dispersion of ellipsometrical angles analyzed using theoretical model as well as over measured data is presented. Binary multilayer grating is modeled via rigorous coupled wave method. The special attention is devoted to additional oxidation of inter-dot area and to an interaction of finite optical beam with super-long-period structure. The results are discussed in the relation to experimental data. (en)
Title
  • Modelling of 2D super-long-period multilayer gratings applied in spectral ellipsometry
  • Modelování 2D mnohovrstvých mřížek se superdlouhou periodou aplikovaného ve spektrální elipsometrii (cs)
  • Modelling of 2D super-long-period multilayer gratings applied in spectral ellipsometry (en)
skos:prefLabel
  • Modelling of 2D super-long-period multilayer gratings applied in spectral ellipsometry
  • Modelování 2D mnohovrstvých mřížek se superdlouhou periodou aplikovaného ve spektrální elipsometrii (cs)
  • Modelling of 2D super-long-period multilayer gratings applied in spectral ellipsometry (en)
skos:notation
  • RIV/61989100:27350/05:00013355!RIV06-GA0-27350___
http://linked.open.../vavai/riv/strany
  • 69-73
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • P(GA202/03/0776)
http://linked.open...iv/cisloPeriodika
  • 1
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 530680
http://linked.open...ai/riv/idVysledku
  • RIV/61989100:27350/05:00013355
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • multilayer gratings; spectral ellipsometry (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...odStatuVydavatele
  • US - Spojené státy americké
http://linked.open...ontrolniKodProRIV
  • [7C7030484EFF]
http://linked.open...i/riv/nazevZdroje
  • Proceedings of SPIE
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...vavai/riv/projekt
http://linked.open...UplatneniVysledku
http://linked.open...v/svazekPeriodika
  • 5945
http://linked.open...iv/tvurceVysledku
  • Pištora, Jaromír
  • Postava, Kamil
  • Vlček, Jaroslav
  • Yamaguchi, Tomuo
  • Brings, Reiner
issn
  • 0277-786X
number of pages
http://localhost/t...ganizacniJednotka
  • 27350
is http://linked.open...avai/riv/vysledek of
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