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rdf:type
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Description
| - Nulovací elipsometr s fázovou modulací (cs)
- A new null ellipsometer is described that uses photoelasticmodulator (PEM). The phase modulation adds a good signal-to-noiseratio, high sensitivity, and linearity near null positions to the traditionalhigh-precision nulling system. The ellipsometric angles Delta and Psi areobtained by azimuth measurement of the analyzer and the polarizer-PEMsystem, for which the first and second harmonics of modulator frequencycross the zeros. We show that the null system is insensitive to ellipsometermisadjustment and component imperfections and modulator calibrationis not needed. In addition, a fast ellipsometer mode for fine changesmeasurement of ellipsometric angles is proposed.
- A new null ellipsometer is described that uses photoelasticmodulator (PEM). The phase modulation adds a good signal-to-noiseratio, high sensitivity, and linearity near null positions to the traditionalhigh-precision nulling system. The ellipsometric angles Delta and Psi areobtained by azimuth measurement of the analyzer and the polarizer-PEMsystem, for which the first and second harmonics of modulator frequencycross the zeros. We show that the null system is insensitive to ellipsometermisadjustment and component imperfections and modulator calibrationis not needed. In addition, a fast ellipsometer mode for fine changesmeasurement of ellipsometric angles is proposed. (en)
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Title
| - Null ellipsometer with phase modulation
- Null ellipsometer with phase modulation (en)
- Nulovací elipsometr s fázovou modulací (cs)
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skos:prefLabel
| - Null ellipsometer with phase modulation
- Null ellipsometer with phase modulation (en)
- Nulovací elipsometr s fázovou modulací (cs)
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skos:notation
| - RIV/61989100:27350/04:00011069!RIV/2005/GA0/273505/N
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http://linked.open.../vavai/riv/strany
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http://linked.open...avai/riv/aktivita
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http://linked.open...avai/riv/aktivity
| - P(GA202/03/0776), P(ME 508)
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http://linked.open...iv/cisloPeriodika
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http://linked.open...vai/riv/dodaniDat
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http://linked.open...aciTvurceVysledku
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http://linked.open.../riv/druhVysledku
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http://linked.open...iv/duvernostUdaju
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http://linked.open...titaPredkladatele
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http://linked.open...dnocenehoVysledku
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http://linked.open...ai/riv/idVysledku
| - RIV/61989100:27350/04:00011069
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http://linked.open...riv/jazykVysledku
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http://linked.open.../riv/klicovaSlova
| - instrumentation, measurement, and metrology;ellipsometry and polarimetry;physical optics: ellipsometry and polarimetry (en)
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http://linked.open.../riv/klicoveSlovo
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http://linked.open...odStatuVydavatele
| - US - Spojené státy americké
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http://linked.open...ontrolniKodProRIV
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http://linked.open...i/riv/nazevZdroje
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http://linked.open...in/vavai/riv/obor
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http://linked.open...ichTvurcuVysledku
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http://linked.open...cetTvurcuVysledku
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http://linked.open...vavai/riv/projekt
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http://linked.open...UplatneniVysledku
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http://linked.open...v/svazekPeriodika
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http://linked.open...iv/tvurceVysledku
| - Pištora, Jaromír
- Postava, Kamil
- Maziewski, A.
- Yamaguchi, T.
- Višňovský, Š.
- Ossikowski, R.
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number of pages
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http://localhost/t...ganizacniJednotka
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