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Description
  • Magnetronové plazma je realizován doutnavým výbojem v magnetickém poli mezi katodou a vakuovou nádobou. Systém elektrod byl navržen tak, aby dokázal vnutit plazmatu poruchu, která by dokázala ovlivnit dynamiku typického módu. Aplikováním rotující poruchy se stejným vlnovým číslem a frekvencí jako typický mód, jsme prokázali tok energie do tohoto módu. Byla také prokázána souvislost mezi fází poruchy a typického módu. (cs)
  • The magnetron sputtering plasma is a magnetized glow discharge established between a cathode and the vacuum vessel. A system of active electrodes has been used to impose a rotating perturbation inside the plasma, with the aim of affecting the dynamics of the naturally present modes, which are interpreted as drift waves. By applying a perturbation having the same wavenumber and frequency of one of the plasma modes it has been proved that it is possible to transfer energy to this mode. A phase synchronization between the external perturbation and the natural mode has been observed to occur intermittently. A clear relationship between the phase synchronization and the relative energy of the selected mode has been found. The observed phenomenology has the features of a resonant process. Counter-rotating perturbations are found to be ineffective.
  • The magnetron sputtering plasma is a magnetized glow discharge established between a cathode and the vacuum vessel. A system of active electrodes has been used to impose a rotating perturbation inside the plasma, with the aim of affecting the dynamics of the naturally present modes, which are interpreted as drift waves. By applying a perturbation having the same wavenumber and frequency of one of the plasma modes it has been proved that it is possible to transfer energy to this mode. A phase synchronization between the external perturbation and the natural mode has been observed to occur intermittently. A clear relationship between the phase synchronization and the relative energy of the selected mode has been found. The observed phenomenology has the features of a resonant process. Counter-rotating perturbations are found to be ineffective. (en)
Title
  • Synchronization of drift waves a DC magnetron sputtering device
  • Synchronization of drift waves a DC magnetron sputtering device (en)
  • Synchronizace driftové vlny v DC magnetronu pro naprašování (cs)
skos:prefLabel
  • Synchronization of drift waves a DC magnetron sputtering device
  • Synchronization of drift waves a DC magnetron sputtering device (en)
  • Synchronizace driftové vlny v DC magnetronu pro naprašování (cs)
skos:notation
  • RIV/61389021:_____/04:00103226!RIV/2005/AV0/A52005/N
http://linked.open.../vavai/riv/strany
  • 227;230
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • Z(AV0Z2043910)
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 589237
http://linked.open...ai/riv/idVysledku
  • RIV/61389021:_____/04:00103226
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • magnetron, probe (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...ontrolniKodProRIV
  • [8418BB59CDCC]
http://linked.open...v/mistoKonaniAkce
  • London
http://linked.open...i/riv/mistoVydani
  • London
http://linked.open...i/riv/nazevZdroje
  • Proceedings of the 31th EPS on Controlled Fusion and Plasma Physics
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...UplatneniVysledku
http://linked.open...iv/tvurceVysledku
  • Adámek, Jiří
  • Cavazzana, R.
  • Zuin, M.
  • Martines, E.
  • Spolaore, M.
  • Antoni, V.
  • Serianni, G.
http://linked.open...vavai/riv/typAkce
http://linked.open.../riv/zahajeniAkce
http://linked.open...n/vavai/riv/zamer
number of pages
http://purl.org/ne...btex#hasPublisher
  • EPS
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