About: Characterization of hydrogen contained in passivated poly-Si and microcrystalline-Si by ERDA technique     Goto   Sponge   NotDistinct   Permalink

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Description
  • Polycrystalline Si (poly-Si) thin films produced by atmospheric pressure chemical vapour deposition (APCVD) were treated by hydrogen passivation in the remote plasma system. Such materials could be potentially used for photovoltaics applications. The purpose of the present study was to investigate the effects of hydrogen passivation on poly-Si thin film properties, such as hall mobility and photoluminescence. Elastic recoil detection analysis (ERDA) was used to determine the depth distribution and concentration of hydrogen. ERDA was also applied to determine the hydrogen content of amorphous/microcrystalline silicon produced by plasma enhanced chemical vapour deposition (PECVD) with various dilution ratios of the working gases (H2 and SiH4).
  • Polycrystalline Si (poly-Si) thin films produced by atmospheric pressure chemical vapour deposition (APCVD) were treated by hydrogen passivation in the remote plasma system. Such materials could be potentially used for photovoltaics applications. The purpose of the present study was to investigate the effects of hydrogen passivation on poly-Si thin film properties, such as hall mobility and photoluminescence. Elastic recoil detection analysis (ERDA) was used to determine the depth distribution and concentration of hydrogen. ERDA was also applied to determine the hydrogen content of amorphous/microcrystalline silicon produced by plasma enhanced chemical vapour deposition (PECVD) with various dilution ratios of the working gases (H2 and SiH4). (en)
  • Tenké vrstvy polykrystalického křemíku byly připravovány chemickým napařovaním za atmosférického tlaku (APCVD) a byly pasivovány vodíkem v plasmatu. Takové materiály by mohly být perspektivní jako solární články a byl studován vliv pasivace vodíkem na vlastnosti polykrystalických křemíkových vrstev jako např. luminiscence. Metoda elastického dopředného rozptylu ERDA byla použita pro studium distribuce vodíku v připravených vrstvách a dále byla použita pro studium vodíku ve vrstvách mikrokrystalického křemíku připraveného PECVD s různými poměry H2 a SiH4 v pracovním plynu. Byla zjištěna závislost koncentrace vodíku na krystalinitě vrstev. (cs)
Title
  • Characterization of hydrogen contained in passivated poly-Si and microcrystalline-Si by ERDA technique
  • Charakterizace vodíku obsaženého ve vrstvách pasivovaného polykrystalického a mikrokrystalického křemíku s použitím metody ERDA (cs)
  • Characterization of hydrogen contained in passivated poly-Si and microcrystalline-Si by ERDA technique (en)
skos:prefLabel
  • Characterization of hydrogen contained in passivated poly-Si and microcrystalline-Si by ERDA technique
  • Charakterizace vodíku obsaženého ve vrstvách pasivovaného polykrystalického a mikrokrystalického křemíku s použitím metody ERDA (cs)
  • Characterization of hydrogen contained in passivated poly-Si and microcrystalline-Si by ERDA technique (en)
skos:notation
  • RIV/61389005:_____/06:00032381!RIV07-AV0-61389005
http://linked.open.../vavai/riv/strany
  • 819;822
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • P(LC06041), Z(AV0Z10100523), Z(AV0Z10480505)
http://linked.open...iv/cisloPeriodika
  • 4
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 468398
http://linked.open...ai/riv/idVysledku
  • RIV/61389005:_____/06:00032381
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • ERDA; hydrogen concentration,; thin film solar cells (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...odStatuVydavatele
  • GB - Spojené království Velké Británie a Severního Irska
http://linked.open...ontrolniKodProRIV
  • [5051E24A3430]
http://linked.open...i/riv/nazevZdroje
  • Surface and Interface Analysis
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...vavai/riv/projekt
http://linked.open...UplatneniVysledku
http://linked.open...v/svazekPeriodika
  • 38
http://linked.open...iv/tvurceVysledku
  • Macková, Anna
  • Fejfar, Antonín
  • Kočka, Jan
  • Boldyryeva, Hanna
  • Honda, Shinya
  • Mates, Tomáš
http://linked.open...n/vavai/riv/zamer
issn
  • 0142-2421
number of pages
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