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  • Films based on silicon nitride with hardness up to 31 GPa were deposited in a triple torch plasma reactor. The hard films required substrate temperatures above 1000oC and exhibited a presence of both alfa- and beta-Si3N4 crystallites.
  • Films based on silicon nitride with hardness up to 31 GPa were deposited in a triple torch plasma reactor. The hard films required substrate temperatures above 1000oC and exhibited a presence of both alfa- and beta-Si3N4 crystallites. (en)
  • Vrstvy na bázi nitridu křemíku o tvrdosti do 31 GPa byly nanášeny v trojitém reaktoru s plasmatem pochodňového výboje. Tvrdé vrstvy vyžadují teplotu podložky nad 1000oC a vykazují přítomnost obou krystalických fází alfa- a beta-Si3N4. (cs)
Title
  • Thermal Plasma Enhanced Chemical Vapor Deposition of Silicon Nitride Based Hard Coatings
  • Thermal Plasma Enhanced Chemical Vapor Deposition of Silicon Nitride Based Hard Coatings (en)
  • Depozice tvrdých pokrytí na bázi nitridů křemíku pomocí plasmaticky podpořené chemické depozice z plynné fáze (cs)
skos:prefLabel
  • Thermal Plasma Enhanced Chemical Vapor Deposition of Silicon Nitride Based Hard Coatings
  • Thermal Plasma Enhanced Chemical Vapor Deposition of Silicon Nitride Based Hard Coatings (en)
  • Depozice tvrdých pokrytí na bázi nitridů křemíku pomocí plasmaticky podpořené chemické depozice z plynné fáze (cs)
skos:notation
  • RIV/61389005:_____/05:00030577!RIV06-AV0-61389005
http://linked.open.../vavai/riv/strany
  • 265;266
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • P(GA104/03/0385), Z(AV0Z10480505)
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
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  • 546675
http://linked.open...ai/riv/idVysledku
  • RIV/61389005:_____/05:00030577
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • chemical vapor deposition; silicon nitride (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...ontrolniKodProRIV
  • [AFD3A0FC0704]
http://linked.open...v/mistoKonaniAkce
  • Podbanské
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  • Bratislava
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  • Book of Contributes Papers
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http://linked.open...iv/tvurceVysledku
  • Macková, Anna
  • Peřina, Vratislav
  • Zajíčková, L.
  • Wagner, N.
  • Heberlein, J. V. R.
  • Cordill, M. J.
  • Gerberich, W. W.
http://linked.open...vavai/riv/typAkce
http://linked.open.../riv/zahajeniAkce
http://linked.open...n/vavai/riv/zamer
number of pages
http://purl.org/ne...btex#hasPublisher
  • Fyzikálny ústav SAV
https://schema.org/isbn
  • 80-223-2018-8
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