About: RBS and XPS study of TiOx layers prepared by the PVD technique .

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	The PVD coatings were prepared using Sulzer Innotec's closed magnetic field unbalanced magnetron sputtering facility. The deposition parameters of bias and oxygen flow rate were varied. The prepared samples were analysed by RBS (Rutherford backscattering spectrometry) to determine the Ti/O ratios and the thicknesses of the coatings, and by ERDA (elastic recoil detection analysis) to investigate the hydrogen content in the surface layer. XPS was used to characterize the near-surface composition and chemical bonding. Measurements of mechanical properties (hardness and thickness) were performed. We concluded from RBS analysis that Ti content is enhanced according to the increased bias and the decreased oxygen flow rate. We observed the increasing hardness in the case of the higher Ti content layers prepared. We found that a contaminated surface layer exists in which hydrogen, oxygen and carbon are incorporated. The PVD coatings were prepared using Sulzer Innotec's closed magnetic field unbalanced magnetron sputtering facility. The deposition parameters of bias and oxygen flow rate were varied. The prepared samples were analysed by RBS (Rutherford backscattering spectrometry) to determine the Ti/O ratios and the thicknesses of the coatings, and by ERDA (elastic recoil detection analysis) to investigate the hydrogen content in the surface layer. XPS was used to characterize the near-surface composition and chemical bonding. Measurements of mechanical properties (hardness and thickness) were performed. We concluded from RBS analysis that Ti content is enhanced according to the increased bias and the decreased oxygen flow rate. We observed the increasing hardness in the case of the higher Ti content layers prepared. We found that a contaminated surface layer exists in which hydrogen, oxygen and carbon are incorporated. (en) Metodou RBS byly určeny poměry Ti/0 a tloušťka povlaků. Metodou ERDA byl vyšetřován obsah vodíku v povrchové vrstvě. Metodou XPS bylo charakterizováno složení v blízkosti povrchu a chemické vazby. (cs)
Title	RBS and XPS study of TiOx layers prepared by the PVD technique . Studium vrstech TiOx připravených technikou PVD metodami RBS a XPS (cs) RBS and XPS study of TiOx layers prepared by the PVD technique . (en)
skos:prefLabel	RBS and XPS study of TiOx layers prepared by the PVD technique . Studium vrstech TiOx připravených technikou PVD metodami RBS a XPS (cs) RBS and XPS study of TiOx layers prepared by the PVD technique . (en)
skos:notation	RIV/61389005:_____/04:00105673!RIV/2005/GA0/A49005/N
http://linked.open.../vavai/riv/strany	1171;1173
http://linked.open...avai/riv/aktivita	P Z
http://linked.open...avai/riv/aktivity	P(GP102/01/D069), Z(AV0Z1048901)
http://linked.open...iv/cisloPeriodika	8
http://linked.open...vai/riv/dodaniDat	2005
http://linked.open...aciTvurceVysledku	Peřina, Vratislav Macková, Anna
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Ústav jaderné fyziky AV ČR, v. v. i.
http://linked.open...dnocenehoVysledku	583601
http://linked.open...ai/riv/idVysledku	RIV/61389005:_____/04:00105673
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	RBS;ERDA;TiOx (en)
http://linked.open.../riv/klicoveSlovo	TiOx ERDA RBS
http://linked.open...odStatuVydavatele	GB - Spojené království Velké Británie a Severního Irska
http://linked.open...ontrolniKodProRIV	[C989072D4F89]
http://linked.open...i/riv/nazevZdroje	Survace and Interface Analysis
http://linked.open...in/vavai/riv/obor	BM
http://linked.open...ichTvurcuVysledku	2 (xsd:int)
http://linked.open...cetTvurcuVysledku	5 (xsd:int)
http://linked.open...vavai/riv/projekt	Analysis of progressive materials by nuclear analytical methods
http://linked.open...UplatneniVysledku	2004
http://linked.open...v/svazekPeriodika	36
http://linked.open...iv/tvurceVysledku	Macková, Anna Peřina, Vratislav Zemek, J. Krumeich, J. Kolouch, A.
http://linked.open...n/vavai/riv/zamer	Theoretical and experimental investigation of atomic nuclei and exploitation of nuclear methods in interdisciplinary research
issn	0142-2421
number of pages	3 (xsd:int)

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