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  • In this work, we have studied the composition of polymer thin films prepared by plasma polymerisation and d.c. magnetron sputtering. We investigated two sets of samples, one set Ag composite layers and the second set nitrogen containing plasma polymers, both deposited on the silicon substrate. The Rutherford Backscattering Spectrometry and Elastic Recoil Detection Analysis measurement was used to characterize the composition and to determine the element depth profiles in the deposited layers.
  • In this work, we have studied the composition of polymer thin films prepared by plasma polymerisation and d.c. magnetron sputtering. We investigated two sets of samples, one set Ag composite layers and the second set nitrogen containing plasma polymers, both deposited on the silicon substrate. The Rutherford Backscattering Spectrometry and Elastic Recoil Detection Analysis measurement was used to characterize the composition and to determine the element depth profiles in the deposited layers. (en)
  • Bylo studováno složení tenkých polymerních filmů, připravených plasmovou polymerizací a stejnosměrným magnetronovým sputteringem. Bylo charakterizováno složení a určeny prvkové hloubkové profily v deponovaných vrstvách. (cs)
Title
  • Investigation of plasma polymer and nano composite polymer films by Rutherford Backscattering Spectrometry and by Elastic Recoil Detection Analysis analytical methods
  • Vyšetřování plazmových polymerů a nanokompozitních polymerních filmů analytickými metodami spektroskopie Rutherfordova zpětného rozptylu a detekcí elastického odrazu (cs)
  • Investigation of plasma polymer and nano composite polymer films by Rutherford Backscattering Spectrometry and by Elastic Recoil Detection Analysis analytical methods (en)
skos:prefLabel
  • Investigation of plasma polymer and nano composite polymer films by Rutherford Backscattering Spectrometry and by Elastic Recoil Detection Analysis analytical methods
  • Vyšetřování plazmových polymerů a nanokompozitních polymerních filmů analytickými metodami spektroskopie Rutherfordova zpětného rozptylu a detekcí elastického odrazu (cs)
  • Investigation of plasma polymer and nano composite polymer films by Rutherford Backscattering Spectrometry and by Elastic Recoil Detection Analysis analytical methods (en)
skos:notation
  • RIV/61389005:_____/04:00101838!RIV/2005/MSM/A49005/N
http://linked.open.../vavai/riv/strany
  • 7;10
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • P(GP102/01/D069), P(KSK1048102), P(OC 527.100), Z(AV0Z1048901), Z(MSM 113200002)
http://linked.open...iv/cisloPeriodika
  • 1
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
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http://linked.open...iv/duvernostUdaju
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  • 568910
http://linked.open...ai/riv/idVysledku
  • RIV/61389005:_____/04:00101838
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  • coatings (en)
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  • SK - Slovenská republika
http://linked.open...ontrolniKodProRIV
  • [9E88F405D023]
http://linked.open...i/riv/nazevZdroje
  • Acta Physica Slovaca
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
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http://linked.open...vavai/riv/projekt
http://linked.open...UplatneniVysledku
http://linked.open...v/svazekPeriodika
  • 54
http://linked.open...iv/tvurceVysledku
  • Biederman, H.
  • Choukourov, A.
  • Hnatowicz, Vladimír
  • Macková, Anna
  • Peřina, Vratislav
  • Slavínská, D.
http://linked.open...n/vavai/riv/zamer
issn
  • 0323-0465
number of pages
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