About: Plasma chemistry during the deposition of a-C : H films and its influence on film properties.

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About: Plasma chemistry during the deposition of a-C : H films and its influence on film properties. Goto Sponge NotDistinct Permalink

An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	Plasma chemistry in an argon/acetylene expanding thermal plasma was studied by means of a residual gas analyser (RGA) and cavity ring down spectroscopy (CRDS). With RGA, the consumption of acetylene in the plasma and the production of the C4H2 molecule was measured. CRDS was used for C, CH and C-2 radical detection. It is demonstrated that C, CH and C-2 are products of a secondary reaction chain of argon ions and electrons with radical products formed after the primary reaction of argon ions and electrons with acetylene. By increasing the acetylene injection the composition of the plasma, and consequently the film properties, can be controlled. The growth of the films was monitored using in situ real time single wavelength ellipsometry. Films were analysed with Rutherford backscattering combined with elastic recoil detection analysis and with ex situ spectroscopic ellipsometry. The film properties reflect clearly the different plasma composition. Possible consequences for hydrogenated amorphous carbon Plasma chemistry in an argon/acetylene expanding thermal plasma was studied by means of a residual gas analyser (RGA) and cavity ring down spectroscopy (CRDS). With RGA, the consumption of acetylene in the plasma and the production of the C4H2 molecule was measured. CRDS was used for C, CH and C-2 radical detection. It is demonstrated that C, CH and C-2 are products of a secondary reaction chain of argon ions and electrons with radical products formed after the primary reaction of argon ions and electrons with acetylene. By increasing the acetylene injection the composition of the plasma, and consequently the film properties, can be controlled. The growth of the films was monitored using in situ real time single wavelength ellipsometry. Films were analysed with Rutherford backscattering combined with elastic recoil detection analysis and with ex situ spectroscopic ellipsometry. The film properties reflect clearly the different plasma composition. Possible consequences for hydrogenated amorphous carbon (en)
Title	Plasma chemistry during the deposition of a-C : H films and its influence on film properties. Plasma chemistry during the deposition of a-C : H films and its influence on film properties. (en)
skos:prefLabel	Plasma chemistry during the deposition of a-C : H films and its influence on film properties. Plasma chemistry during the deposition of a-C : H films and its influence on film properties. (en)
skos:notation	RIV/61389005:_____/03:49033067!RIV/2004/AV0/A49004/N
http://linked.open.../vavai/riv/strany	90;97
http://linked.open...avai/riv/aktivita	P Z
http://linked.open...avai/riv/aktivity	P(GA104/03/0385), P(KSK4055109), Z(AV0Z1048901)
http://linked.open...iv/cisloPeriodika	2
http://linked.open...vai/riv/dodaniDat	2004
http://linked.open...aciTvurceVysledku	Peřina, Vratislav
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Ústav jaderné fyziky AV ČR, v. v. i.
http://linked.open...dnocenehoVysledku	621033
http://linked.open...ai/riv/idVysledku	RIV/61389005:_____/03:49033067
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	plasma chemistry; spectroscopic ellipsometry (en)
http://linked.open.../riv/klicoveSlovo	spectroscopic ellipsometry plasma chemistry
http://linked.open...odStatuVydavatele	CH - Švýcarská konfederace
http://linked.open...ontrolniKodProRIV	[858A7F4FD156]
http://linked.open...i/riv/nazevZdroje	DIAMOND AND RELATED MATERIALS
http://linked.open...in/vavai/riv/obor	BL
http://linked.open...ichTvurcuVysledku	1 (xsd:int)
http://linked.open...cetTvurcuVysledku	6 (xsd:int)
http://linked.open...ocetUcastnikuAkce	0 (xsd:int)
http://linked.open...nichUcastnikuAkce	0 (xsd:int)
http://linked.open...vavai/riv/projekt	Physics, chemistry and informatics for biological, ecological and medicinal applications New technology of optical thin layers based on carbon and organic materials for active structure of integrated optics
http://linked.open...UplatneniVysledku	2003
http://linked.open...v/svazekPeriodika	12
http://linked.open...iv/tvurceVysledku	Hong, J. Peřina, Vratislav Benedikt, J. Woen, R. V. van Mensfoort, S. L. M. van de Sanden, M. C. M.
http://linked.open...n/vavai/riv/zamer	Theoretical and experimental investigation of atomic nuclei and exploitation of nuclear methods in interdisciplinary research
issn	0925-9635
number of pages	8 (xsd:int)

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