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  • At present nothing is known about the way the amorphized zone in high-fluence nitrogen irradiated silicon distributes in three dimensions. This is examined here for the first time by a modified tomographic approach which enables us to reconstruct the high-fluence implantation distribution and the growth of the amorphized zone in three dimensions. It turns out that the latter does not grow isotropically, but preferentially in the forward direction, its 3D shape being cylindrical at medium fluences, and resembling that of a truncated egg at the highest fluences studied.
  • At present nothing is known about the way the amorphized zone in high-fluence nitrogen irradiated silicon distributes in three dimensions. This is examined here for the first time by a modified tomographic approach which enables us to reconstruct the high-fluence implantation distribution and the growth of the amorphized zone in three dimensions. It turns out that the latter does not grow isotropically, but preferentially in the forward direction, its 3D shape being cylindrical at medium fluences, and resembling that of a truncated egg at the highest fluences studied. (en)
Title
  • Tomographic study on high-fluence impact of nitrogen into silicon.
  • Tomographic study on high-fluence impact of nitrogen into silicon. (en)
skos:prefLabel
  • Tomographic study on high-fluence impact of nitrogen into silicon.
  • Tomographic study on high-fluence impact of nitrogen into silicon. (en)
skos:notation
  • RIV/61389005:_____/00:49000250!RIV/2003/AV0/A49003/N
http://linked.open.../vavai/riv/strany
  • 658;664
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  • Z(AV0Z1048901)
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  • 729392
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  • RIV/61389005:_____/00:49000250
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  • N/A (en)
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  • GB - Spojené království Velké Británie a Severního Irska
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  • [D976C28510D1]
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  • Semiconductor Science and Technology
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  • 15
http://linked.open...iv/tvurceVysledku
  • Hnatowicz, Vladimír
  • Vacík, Jiří
  • Muller, M.
  • Fink, D.
  • Červená, Jarmila
http://linked.open...n/vavai/riv/zamer
issn
  • 0268-1242
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