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Description
  • The paper presents overview of semiconductor gas sensors which utilize porous polycrystalline resistors made of semiconducting metal oxides. Basic sensor construction, working principle of the sensors and main advantage and disadvantage are discussed. Thick- and thin-film fabrication technology is briefly mentioned. Some examples of Figaro sensors are presented.
  • The paper presents overview of semiconductor gas sensors which utilize porous polycrystalline resistors made of semiconducting metal oxides. Basic sensor construction, working principle of the sensors and main advantage and disadvantage are discussed. Thick- and thin-film fabrication technology is briefly mentioned. Some examples of Figaro sensors are presented. (en)
  • Příspěvek presentuje přehled polovodičových senzorů plynů, které využívají vlastností polykrystalických polovodivých oxidů kovů. Diskutují se konstrukce senzorů, princip činnosti a hlavní výhody a nevýhody senzorů. V krátkosti jsou uvedeny technologie přípravy tlustých a tenkých filmů. Jsou uvedeny základní parametry senzorů firmy Figaro. (cs)
Title
  • Polovodičové senzory plynů - historie a současnost (cs)
  • Semiconductor gas sensors-history and present state
  • Semiconductor gas sensors-history and present state (en)
skos:prefLabel
  • Polovodičové senzory plynů - historie a současnost (cs)
  • Semiconductor gas sensors-history and present state
  • Semiconductor gas sensors-history and present state (en)
skos:notation
  • RIV/60461373:22340/04:00011246!RIV/2005/MSM/223405/N
http://linked.open.../vavai/riv/strany
  • R051:1-5
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  • Z(MSM 223400007)
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  • 585829
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  • RIV/60461373:22340/04:00011246
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  • Gas sensors;semiconductors;thin films (en)
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http://linked.open...ontrolniKodProRIV
  • [2E9AD8D65554]
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  • Kouty nad Desnou, Czech Republic
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  • Pardubice
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  • Proc. of the 6th International Scientific-Technical Conference Process Control 2004
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  • Široký, Karel
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number of pages
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  • Univerzita Pardubice
https://schema.org/isbn
  • 80-7194-662-1
http://localhost/t...ganizacniJednotka
  • 22340
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