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  • For the successful preparation of LiNbO3 thin layer by PLD process, the maximal density of the used polycrystalline target is of great importance. With respect to this assumption, precursor powders prepared by Pechini polyesterification were tested at PLD target synthesis. Gels prepared by this sol?gel method, using citric acid and ethylene glycol as an organic matrix components, were decomposed afterwards using various temperatures (800, 600 and 400 °C) and atmospheres (air, nitrogen and oxygen in sequence). Out of several combinations tested, the decomposition at 800 °C in nitrogen followed by the oxidation at 400 °C in oxygen was found to be the best way to achieve the minimal particle size of powder precursor resulting in denser targets. Apart from the density, the prepared targets were characterized by XRD, SEM and EDX methods. A LiNbO3:Er target was subsequently prepared using the optimized process. Deposited layers were compared with the layers deposited from a commercial monocrystalline target. The layers from polycrystalline target resulted thinner and less rough.
  • For the successful preparation of LiNbO3 thin layer by PLD process, the maximal density of the used polycrystalline target is of great importance. With respect to this assumption, precursor powders prepared by Pechini polyesterification were tested at PLD target synthesis. Gels prepared by this sol?gel method, using citric acid and ethylene glycol as an organic matrix components, were decomposed afterwards using various temperatures (800, 600 and 400 °C) and atmospheres (air, nitrogen and oxygen in sequence). Out of several combinations tested, the decomposition at 800 °C in nitrogen followed by the oxidation at 400 °C in oxygen was found to be the best way to achieve the minimal particle size of powder precursor resulting in denser targets. Apart from the density, the prepared targets were characterized by XRD, SEM and EDX methods. A LiNbO3:Er target was subsequently prepared using the optimized process. Deposited layers were compared with the layers deposited from a commercial monocrystalline target. The layers from polycrystalline target resulted thinner and less rough. (en)
Title
  • LiNbO3 Precursor for PLD Targets Prepared by Sol-Gel
  • LiNbO3 Precursor for PLD Targets Prepared by Sol-Gel (en)
skos:prefLabel
  • LiNbO3 Precursor for PLD Targets Prepared by Sol-Gel
  • LiNbO3 Precursor for PLD Targets Prepared by Sol-Gel (en)
skos:notation
  • RIV/60461373:22310/13:43895427!RIV14-GA0-22310___
http://linked.open...avai/predkladatel
http://linked.open...avai/riv/aktivita
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  • P(GAP106/10/1477)
http://linked.open...iv/cisloPeriodika
  • 6
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  • 84986
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  • RIV/60461373:22310/13:43895427
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  • SOL?GEL; PLD; PECHINI POLYESTERIFICATION; LITHIUM NIOBATE (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...odStatuVydavatele
  • US - Spojené státy americké
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  • [E517790AB0C0]
http://linked.open...i/riv/nazevZdroje
  • Advanced Science, Engineering and Medicine
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http://linked.open...v/svazekPeriodika
  • 5
http://linked.open...iv/tvurceVysledku
  • Jelínek, Miroslav
  • Jakeš, Vít
  • Erben, Jakub
  • Rubešová, Kateřina
  • Chvalová, Martina
issn
  • 2164-6627
number of pages
http://bibframe.org/vocab/doi
  • 10.1166/asem.2013.1323
http://localhost/t...ganizacniJednotka
  • 22310
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