About: Study of Er+ ion-implanted lithium niobate structure after an annealing procedure by RBS and RBS/channelling     Goto   Sponge   NotDistinct   Permalink

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  • Erbium-doped lithium niobate (Er:LiNbO3) is a prospective photonics component, operating at λ = 1.5 μm, which could be used as an optical amplifier or waveguide laser. We have focused on the structure of Er:LiNbO3 layers created by 330 keV erbium ion implantation (fluences 1.0 x 1015, 2.5 x 1015 and 1.0 x 1016 cm-2) in the X, Z and two various Y crystallographic cuts of LiNbO3. Five hours annealing at 350 °C was applied to recrystallize the as-implanted layer and to avoid clustering of Er. Depth distribution of implanted Er has been measured by Rutherford Backscattering Spectroscopy (RBS) using 2 MeV He+ ions. Defects distribution and structural changes have been described using the RBS/channelling method. Data obtained made it possible to reveal the relations between the crystallographic orientation of the implanted crystal and the behaviour during the restoration process. The deepest modified layer has been observed in the perpendicular Y cut, which also exhibits the lowest reconstruction
  • Erbium-doped lithium niobate (Er:LiNbO3) is a prospective photonics component, operating at λ = 1.5 μm, which could be used as an optical amplifier or waveguide laser. We have focused on the structure of Er:LiNbO3 layers created by 330 keV erbium ion implantation (fluences 1.0 x 1015, 2.5 x 1015 and 1.0 x 1016 cm-2) in the X, Z and two various Y crystallographic cuts of LiNbO3. Five hours annealing at 350 °C was applied to recrystallize the as-implanted layer and to avoid clustering of Er. Depth distribution of implanted Er has been measured by Rutherford Backscattering Spectroscopy (RBS) using 2 MeV He+ ions. Defects distribution and structural changes have been described using the RBS/channelling method. Data obtained made it possible to reveal the relations between the crystallographic orientation of the implanted crystal and the behaviour during the restoration process. The deepest modified layer has been observed in the perpendicular Y cut, which also exhibits the lowest reconstruction (en)
Title
  • Study of Er+ ion-implanted lithium niobate structure after an annealing procedure by RBS and RBS/channelling
  • Study of Er+ ion-implanted lithium niobate structure after an annealing procedure by RBS and RBS/channelling (en)
skos:prefLabel
  • Study of Er+ ion-implanted lithium niobate structure after an annealing procedure by RBS and RBS/channelling
  • Study of Er+ ion-implanted lithium niobate structure after an annealing procedure by RBS and RBS/channelling (en)
skos:notation
  • RIV/60461373:22310/10:00022986!RIV11-GA0-22310___
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • P(GA106/09/0125), P(LC06041), S, Z(AV0Z10480505)
http://linked.open...iv/cisloPeriodika
  • 11-12
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 290773
http://linked.open...ai/riv/idVysledku
  • RIV/60461373:22310/10:00022986
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • Lithium niobate; Erbium; Ion implantation; RBS/channelling (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...odStatuVydavatele
  • NL - Nizozemsko
http://linked.open...ontrolniKodProRIV
  • [EF31838293FE]
http://linked.open...i/riv/nazevZdroje
  • Nuclear Instruments and Methods in Physics Research, Section B
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...vavai/riv/projekt
http://linked.open...UplatneniVysledku
http://linked.open...v/svazekPeriodika
  • 268
http://linked.open...iv/tvurceVysledku
  • Macková, Anna
  • Malinský, Petr
  • Nekvindová, Pavla
  • Švecová, Blanka
  • Grotzschel, Rainer
http://linked.open...ain/vavai/riv/wos
  • 000278702300076
http://linked.open...n/vavai/riv/zamer
issn
  • 0168-583X
number of pages
http://localhost/t...ganizacniJednotka
  • 22310
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