About: Study of the parameters of barrier torch discharge

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	The deposition of thin films is progressively developing in the last time. One of many possibilities is based on employing active plasma in the plasma - chemical reactor. Two types of discharges are often used for these applications: the RF hollow cathode discharge at low pressure and RF torch discharge burning at atmospheric air - pressure. The technical applications demand knowledge of physical parameters controlling the characteristics of deposited thin films. We have studied RF barrier torch discharge burning at atmospheric air - pressure. Our work concentrates on the diagnostics of the temperature of neutral particles in the working gas - in our case Argon. For study of the transparent objects we have used a configuration of holographic interferometer. The phase shift is computed from the interference pattern by the slightly modified Takeda's method. Providing cylindrical symmetry we apply the inverse Abel transformation to the phase shift to determine the temperature distributions. The deposition of thin films is progressively developing in the last time. One of many possibilities is based on employing active plasma in the plasma - chemical reactor. Two types of discharges are often used for these applications: the RF hollow cathode discharge at low pressure and RF torch discharge burning at atmospheric air - pressure. The technical applications demand knowledge of physical parameters controlling the characteristics of deposited thin films. We have studied RF barrier torch discharge burning at atmospheric air - pressure. Our work concentrates on the diagnostics of the temperature of neutral particles in the working gas - in our case Argon. For study of the transparent objects we have used a configuration of holographic interferometer. The phase shift is computed from the interference pattern by the slightly modified Takeda's method. Providing cylindrical symmetry we apply the inverse Abel transformation to the phase shift to determine the temperature distributions. (en)
Title	Study of the parameters of barrier torch discharge Study of the parameters of barrier torch discharge (en)
skos:prefLabel	Study of the parameters of barrier torch discharge Study of the parameters of barrier torch discharge (en)
skos:notation	RIV/60076658:_____/02:00004165!RIV/2003/MSM/120003/N
http://linked.open.../vavai/riv/strany	509-514
http://linked.open...avai/riv/aktivita	Z
http://linked.open...avai/riv/aktivity	Z(MSM 124100004)
http://linked.open...iv/cisloPeriodika	52
http://linked.open...vai/riv/dodaniDat	2003
http://linked.open...aciTvurceVysledku	Straňák, Vítězslav Kříž, Pavel Blažek, Josef
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Jihočeská univerzita v Českých Budějovicích / (nerozlišená součást)
http://linked.open...dnocenehoVysledku	665783
http://linked.open...ai/riv/idVysledku	RIV/60076658:_____/02:00004165
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	barrier torch discharge, gas temperature, optical diagnostics (en)
http://linked.open.../riv/klicoveSlovo	optical diagnostics gas temperature barrier torch discharge
http://linked.open...odStatuVydavatele	CZ - Česká republika
http://linked.open...ontrolniKodProRIV	[B29675D056CD]
http://linked.open...i/riv/nazevZdroje	Czech. J. Phys.
http://linked.open...in/vavai/riv/obor	BL
http://linked.open...ichTvurcuVysledku	3 (xsd:int)
http://linked.open...cetTvurcuVysledku	3 (xsd:int)
http://linked.open...ocetUcastnikuAkce	0 (xsd:int)
http://linked.open...nichUcastnikuAkce	0 (xsd:int)
http://linked.open...UplatneniVysledku	2002
http://linked.open...v/svazekPeriodika	x
http://linked.open...iv/tvurceVysledku	Blažek, Josef Kříž, Pavel Straňák, Vítězslav
http://linked.open...n/vavai/riv/zamer	http://linked.opendata.cz/resource/domain/vavai/zamer/MSM%20124100004
issn	0011-4626
number of pages	6 (xsd:int)

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