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  • In recent years the plasma-aided deposition processes have received an increasing attention. One of them was the plasma polymerisation. This process takes place in plasma of an electrical discharge operated in a mixture of an inert gas (usually argon) and an organic gas or vapour at low pressure. Resulting deposits (called plasma polymers) differ substantially from the conventional polymers; they posses, however, the unique properties. In spite of these successes certain problems remain, for example in reproducibility and ageing of these films mainly because of the lack of the proper in situ plasma diagnostics. The chief diagnostics methods that are used are the optical emission spectroscopy, corpuscular diagnostics (mass spectrometry) and Langmuir probes. For the Langmuir probe plasma diagnostics was especially developed high - speed measuring system controlled by personal computer. The high-speed measuring system gives improvements of the probe diagnostics of the plasma in the specific conditions
  • In recent years the plasma-aided deposition processes have received an increasing attention. One of them was the plasma polymerisation. This process takes place in plasma of an electrical discharge operated in a mixture of an inert gas (usually argon) and an organic gas or vapour at low pressure. Resulting deposits (called plasma polymers) differ substantially from the conventional polymers; they posses, however, the unique properties. In spite of these successes certain problems remain, for example in reproducibility and ageing of these films mainly because of the lack of the proper in situ plasma diagnostics. The chief diagnostics methods that are used are the optical emission spectroscopy, corpuscular diagnostics (mass spectrometry) and Langmuir probes. For the Langmuir probe plasma diagnostics was especially developed high - speed measuring system controlled by personal computer. The high-speed measuring system gives improvements of the probe diagnostics of the plasma in the specific conditions (en)
Title
  • Possibilities of the Application of the Warm Probe combined with Fast Measurement under Conditions of the Plasma - Polymerisation Processes.
  • Possibilities of the Application of the Warm Probe combined with Fast Measurement under Conditions of the Plasma - Polymerisation Processes. (en)
skos:prefLabel
  • Possibilities of the Application of the Warm Probe combined with Fast Measurement under Conditions of the Plasma - Polymerisation Processes.
  • Possibilities of the Application of the Warm Probe combined with Fast Measurement under Conditions of the Plasma - Polymerisation Processes. (en)
skos:notation
  • RIV/60076658:_____/02:00004031!RIV/2003/MSM/120003/N
http://linked.open.../vavai/riv/strany
  • 794-799
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • Z(MSM 124100004)
http://linked.open...iv/cisloPeriodika
  • 52
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
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  • 659123
http://linked.open...ai/riv/idVysledku
  • RIV/60076658:_____/02:00004031
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • langmuir probe, warm probe, fast measurement, (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...odStatuVydavatele
  • CZ - Česká republika
http://linked.open...ontrolniKodProRIV
  • [F042F6F0F627]
http://linked.open...i/riv/nazevZdroje
  • Czech. J. Physics
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...ocetUcastnikuAkce
http://linked.open...nichUcastnikuAkce
http://linked.open...UplatneniVysledku
http://linked.open...v/svazekPeriodika
  • x
http://linked.open...iv/tvurceVysledku
  • Adámek, Petr
  • Kalčík, Jiří
http://linked.open...n/vavai/riv/zamer
issn
  • 0011-4626
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