About: TiOx surface properties in dependency on Glancing Angle Deposition parametres     Goto   Sponge   NotDistinct   Permalink

An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

AttributesValues
rdf:type
Description
  • The aim of this paper is to show the importance of Glancing Angle Deposition parameters on morphology and surface properties thin TiOx films. Special interest was focused on the roughness investigated layers. Thin films were deposited by DC unbalanced magnetron sputtering at low temperature. Four types of architecture were achieved by Glancing Angle Deposition Methods. Those layers were diagnosed by AFM and SEM. TiNxOy films were investigated besides the TiOx layers. All the films were deposited for two typed of GLAD, namely for Reactive Gas Constant Flow (RGCF) and Reactive Gas Pulsing Proccess (RGPP) during the deposition. The influence of deposition method is investigated in focus on surface properties.
  • The aim of this paper is to show the importance of Glancing Angle Deposition parameters on morphology and surface properties thin TiOx films. Special interest was focused on the roughness investigated layers. Thin films were deposited by DC unbalanced magnetron sputtering at low temperature. Four types of architecture were achieved by Glancing Angle Deposition Methods. Those layers were diagnosed by AFM and SEM. TiNxOy films were investigated besides the TiOx layers. All the films were deposited for two typed of GLAD, namely for Reactive Gas Constant Flow (RGCF) and Reactive Gas Pulsing Proccess (RGPP) during the deposition. The influence of deposition method is investigated in focus on surface properties. (en)
Title
  • TiOx surface properties in dependency on Glancing Angle Deposition parametres
  • TiOx surface properties in dependency on Glancing Angle Deposition parametres (en)
skos:prefLabel
  • TiOx surface properties in dependency on Glancing Angle Deposition parametres
  • TiOx surface properties in dependency on Glancing Angle Deposition parametres (en)
skos:notation
  • RIV/60076658:12410/11:43883191!RIV12-AV0-12410___
http://linked.open...avai/predkladatel
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • P(KAN101120701)
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 235407
http://linked.open...ai/riv/idVysledku
  • RIV/60076658:12410/11:43883191
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • GLAD, PVD, RGPP, surface properties, roughness (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...ontrolniKodProRIV
  • [79D6AB160C5C]
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...vavai/riv/projekt
http://linked.open...UplatneniVysledku
http://linked.open...iv/tvurceVysledku
  • Kříž, Pavel
  • Bartoš, Petr
  • Špatenka, Petr
  • Michalčík, Zdeněk
http://localhost/t...ganizacniJednotka
  • 12410
Faceted Search & Find service v1.16.118 as of Jun 21 2024


Alternative Linked Data Documents: ODE     Content Formats:   [cxml] [csv]     RDF   [text] [turtle] [ld+json] [rdf+json] [rdf+xml]     ODATA   [atom+xml] [odata+json]     Microdata   [microdata+json] [html]    About   
This material is Open Knowledge   W3C Semantic Web Technology [RDF Data] Valid XHTML + RDFa
OpenLink Virtuoso version 07.20.3240 as of Jun 21 2024, on Linux (x86_64-pc-linux-gnu), Single-Server Edition (126 GB total memory, 58 GB memory in use)
Data on this page belongs to its respective rights holders.
Virtuoso Faceted Browser Copyright © 2009-2024 OpenLink Software