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Description
| - The aim of this paper is to show the importance of Glancing Angle Deposition parameters on morphology and surface properties thin TiOx films. Special interest was focused on the roughness investigated layers. Thin films were deposited by DC unbalanced magnetron sputtering at low temperature. Four types of architecture were achieved by Glancing Angle Deposition Methods. Those layers were diagnosed by AFM and SEM. TiNxOy films were investigated besides the TiOx layers. All the films were deposited for two typed of GLAD, namely for Reactive Gas Constant Flow (RGCF) and Reactive Gas Pulsing Proccess (RGPP) during the deposition. The influence of deposition method is investigated in focus on surface properties.
- The aim of this paper is to show the importance of Glancing Angle Deposition parameters on morphology and surface properties thin TiOx films. Special interest was focused on the roughness investigated layers. Thin films were deposited by DC unbalanced magnetron sputtering at low temperature. Four types of architecture were achieved by Glancing Angle Deposition Methods. Those layers were diagnosed by AFM and SEM. TiNxOy films were investigated besides the TiOx layers. All the films were deposited for two typed of GLAD, namely for Reactive Gas Constant Flow (RGCF) and Reactive Gas Pulsing Proccess (RGPP) during the deposition. The influence of deposition method is investigated in focus on surface properties. (en)
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Title
| - TiOx surface properties in dependency on Glancing Angle Deposition parametres
- TiOx surface properties in dependency on Glancing Angle Deposition parametres (en)
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skos:prefLabel
| - TiOx surface properties in dependency on Glancing Angle Deposition parametres
- TiOx surface properties in dependency on Glancing Angle Deposition parametres (en)
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skos:notation
| - RIV/60076658:12410/11:43883191!RIV12-AV0-12410___
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http://linked.open...avai/predkladatel
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http://linked.open...avai/riv/aktivita
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http://linked.open...avai/riv/aktivity
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http://linked.open...vai/riv/dodaniDat
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http://linked.open...aciTvurceVysledku
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http://linked.open.../riv/druhVysledku
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http://linked.open...iv/duvernostUdaju
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http://linked.open...titaPredkladatele
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http://linked.open...dnocenehoVysledku
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http://linked.open...ai/riv/idVysledku
| - RIV/60076658:12410/11:43883191
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http://linked.open...riv/jazykVysledku
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http://linked.open.../riv/klicovaSlova
| - GLAD, PVD, RGPP, surface properties, roughness (en)
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http://linked.open.../riv/klicoveSlovo
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http://linked.open...ontrolniKodProRIV
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http://linked.open...in/vavai/riv/obor
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http://linked.open...ichTvurcuVysledku
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http://linked.open...cetTvurcuVysledku
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http://linked.open...vavai/riv/projekt
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http://linked.open...UplatneniVysledku
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http://linked.open...iv/tvurceVysledku
| - Kříž, Pavel
- Bartoš, Petr
- Špatenka, Petr
- Michalčík, Zdeněk
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http://localhost/t...ganizacniJednotka
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