About: Computational study of plasma-surface interaction in plasma-assisted technologies

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	The influence of the unevenness of substrates immersed into plasma important for plasma-based treatment of materials were studied by computer experiment. The role of both substrate properties and plasma parameters was investigated. For this analysis the combination of multidimensional fluid modelling and particle simulation was used. The fluid part of our model consisted of continuity equations for all charged species, energy balance equation for electrons and Poisson equation. The basic scattering processes were also included. The particle simulation technique was used both for the calculation of electron energy distribution function and for the derivation of quantities characterising plasma-surface interaction. This approach enabled us to study in detail the structure of the sheath and presheath near metal substrates with realistic geometries and finite dimensions. The main attention was devoted to the influence of substrate geometry in both macroscopic and microscopic spatial scales on the local el The influence of the unevenness of substrates immersed into plasma important for plasma-based treatment of materials were studied by computer experiment. The role of both substrate properties and plasma parameters was investigated. For this analysis the combination of multidimensional fluid modelling and particle simulation was used. The fluid part of our model consisted of continuity equations for all charged species, energy balance equation for electrons and Poisson equation. The basic scattering processes were also included. The particle simulation technique was used both for the calculation of electron energy distribution function and for the derivation of quantities characterising plasma-surface interaction. This approach enabled us to study in detail the structure of the sheath and presheath near metal substrates with realistic geometries and finite dimensions. The main attention was devoted to the influence of substrate geometry in both macroscopic and microscopic spatial scales on the local el (en)
Title	Computational study of plasma-surface interaction in plasma-assisted technologies Computational study of plasma-surface interaction in plasma-assisted technologies (en)
skos:prefLabel	Computational study of plasma-surface interaction in plasma-assisted technologies Computational study of plasma-surface interaction in plasma-assisted technologies (en)
skos:notation	RIV/60076658:12410/09:00010649!RIV10-MSM-12410___
http://linked.open...avai/riv/aktivita	S V Z
http://linked.open...avai/riv/aktivity	S, V, Z(MSM0021620834)
http://linked.open...iv/cisloPeriodika	2
http://linked.open...vai/riv/dodaniDat	2010
http://linked.open...aciTvurceVysledku	Bartoš, Petr
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Jihočeská univerzita v Českých Budějovicích / Pedagogická fakulta
http://linked.open...dnocenehoVysledku	307954
http://linked.open...ai/riv/idVysledku	RIV/60076658:12410/09:00010649
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	hybrid methods; computer modelling; plasma-solid interaction (en)
http://linked.open.../riv/klicoveSlovo	hybrid methods computer modelling plasma-solid interaction
http://linked.open...odStatuVydavatele	US - Spojené státy americké
http://linked.open...ontrolniKodProRIV	[A58191D687B1]
http://linked.open...i/riv/nazevZdroje	European Physical Journal D
http://linked.open...in/vavai/riv/obor	BL
http://linked.open...ichTvurcuVysledku	1 (xsd:int)
http://linked.open...cetTvurcuVysledku	3 (xsd:int)
http://linked.open...UplatneniVysledku	2009
http://linked.open...v/svazekPeriodika	54
http://linked.open...iv/tvurceVysledku	Hrach, Rudolf Hrachová, Věra Bartoš, Petr
http://linked.open...ain/vavai/riv/wos	000268329200040
http://linked.open...n/vavai/riv/zamer	Condensed Matter Physics – New Materials and Technologies
issn	1434-6060
number of pages	7 (xsd:int)
http://localhost/t...ganizacniJednotka	12410
is http://linked.open...avai/riv/vysledek of	Computational study of plasma-surface interaction in plasma-assisted technologies Computational study of plasma-surface interaction in plasma-assisted technologies Computational study of plasma-surface interaction in plasma-assisted technologies Computational study of plasma-surface interaction in plasma-assisted technologies

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