About: Study of electronegative Ar/O-2 discharge by means of Langmuir probe

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	The paper presents systematic Langmuir probe diagnostic of a dc discharge in Ar/O-2 mixture with low fraction of O-2, burning in a sputtering planar magnetron. Electron density, electron temperature and plasma potential are investigated in dependence upon experimental conditions like pressure, rate of oxygen, incoming power, and on balanced or unbalanced mode of magnetron. A new method of determining negative-ion density from the current-voltage characteristic is proposed. This method is based on comparison of the characteristic measured in electronegative plasma (e.g. Ar/O-2) with a reference characteristic scanned in ail electropositive counterpart (Ar), existing in similar conditions. The paper presents systematic Langmuir probe diagnostic of a dc discharge in Ar/O-2 mixture with low fraction of O-2, burning in a sputtering planar magnetron. Electron density, electron temperature and plasma potential are investigated in dependence upon experimental conditions like pressure, rate of oxygen, incoming power, and on balanced or unbalanced mode of magnetron. A new method of determining negative-ion density from the current-voltage characteristic is proposed. This method is based on comparison of the characteristic measured in electronegative plasma (e.g. Ar/O-2) with a reference characteristic scanned in ail electropositive counterpart (Ar), existing in similar conditions. (en) The paper presents systematic Langmuir probe diagnostic of a dc discharge in Ar/O-2 mixture with low fraction of O-2, burning in a sputtering planar magnetron. Electron density, electron temperature and plasma potential are investigated in dependence upon experimental conditions like pressure, rate of oxygen, incoming power, and on balanced or unbalanced mode of magnetron. A new method of determining negative-ion density from the current-voltage characteristic is proposed. This method is based on comparison of the characteristic measured in electronegative plasma (e.g. Ar/O-2) with a reference characteristic scanned in ail electropositive counterpart (Ar), existing in similar conditions. (cs)
Title	Study of electronegative Ar/O-2 discharge by means of Langmuir probe Study of electronegative Ar/O-2 discharge by means of Langmuir probe (en) Study of electronegative Ar/O-2 discharge by means of Langmuir probe (cs)
skos:prefLabel	Study of electronegative Ar/O-2 discharge by means of Langmuir probe Study of electronegative Ar/O-2 discharge by means of Langmuir probe (en) Study of electronegative Ar/O-2 discharge by means of Langmuir probe (cs)
skos:notation	RIV/60076658:12410/08:00009203!RIV09-AV0-12410___
http://linked.open...avai/riv/aktivita	P Z
http://linked.open...avai/riv/aktivity	P(KAN101120701), Z(MSM0021620834)
http://linked.open...iv/cisloPeriodika	5-7
http://linked.open...vai/riv/dodaniDat	2009
http://linked.open...aciTvurceVysledku	Adámek, Petr Straňák, Vítězslav Špatenka, Petr Blažek, Josef
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Jihočeská univerzita v Českých Budějovicích / Pedagogická fakulta
http://linked.open...dnocenehoVysledku	398112
http://linked.open...ai/riv/idVysledku	RIV/60076658:12410/08:00009203
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	planar magnetron; probe diagnostics; electronegative plasma; electron density; negative ion density (en)
http://linked.open.../riv/klicoveSlovo	electronegative plasma negative ion density probe diagnostics electron density planar magnetron
http://linked.open...odStatuVydavatele	DE - Spolková republika Německo
http://linked.open...ontrolniKodProRIV	[BA962E9C1DF6]
http://linked.open...i/riv/nazevZdroje	Contribution to plasma physics
http://linked.open...in/vavai/riv/obor	BL
http://linked.open...ichTvurcuVysledku	4 (xsd:int)
http://linked.open...cetTvurcuVysledku	8 (xsd:int)
http://linked.open...vavai/riv/projekt	Nanocomposite films and nanoparticles prepared in low pressure plasma for surface modifications
http://linked.open...UplatneniVysledku	2008
http://linked.open...v/svazekPeriodika	48
http://linked.open...iv/tvurceVysledku	Adámek, Petr Blažek, Josef Hubička, Zdeněk Straňák, Vítězslav Špatenka, Petr Tichý, Milan Hippler, Reiner Wrehde, Joseph
http://linked.open...ain/vavai/riv/wos	000258126900020
http://linked.open...n/vavai/riv/zamer	Condensed Matter Physics – New Materials and Technologies
issn	0863-1042
number of pages	6 (xsd:int)
http://localhost/t...ganizacniJednotka	12410
is http://linked.open...avai/riv/vysledek of	Study of electronegative Ar/O-2 discharge by means of Langmuir probe Study of electronegative Ar/O-2 discharge by means of Langmuir probe Study of electronegative Ar/O-2 discharge by means of Langmuir probe Study of electronegative Ar/O-2 discharge by means of Langmuir probe

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