About: Investigation of internal plasma parameters in a reactor for plasma enhanced hot filament chemical vapour deposition of carbon nanotubes     Goto   Sponge   NotDistinct   Permalink

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  • The plasma enhanced hot filament chemical vapour deposition process used for deposition of carbon nanotubes was investigated using Langmuir probes and optical emission spectroscopy. The electron density, electron temperature and plasma potential were measured in relation to the discharge voltage and substrate temperature. The results are discussed in connection with the conditions for the growth of nanotubes. It is demonstrated that the production of reactive heavy particles like hydrocarbon ions takes place predominantly in the sheath region, close to the negatively biased substrate. This conclusion is supported by model calculations of the discharge current.
  • The plasma enhanced hot filament chemical vapour deposition process used for deposition of carbon nanotubes was investigated using Langmuir probes and optical emission spectroscopy. The electron density, electron temperature and plasma potential were measured in relation to the discharge voltage and substrate temperature. The results are discussed in connection with the conditions for the growth of nanotubes. It is demonstrated that the production of reactive heavy particles like hydrocarbon ions takes place predominantly in the sheath region, close to the negatively biased substrate. This conclusion is supported by model calculations of the discharge current. (en)
  • Deposice uhlíkových nanotrubic metodou deposice plynné fáze za přítomnosti plazmatu se žhaveným vláknem byla studována s pomocí langmuirovské sondy a optické emisní spektroskopie. Elektronová hustota, elektronová teplota a potenciál plazmatu byly měřeny ve vztahu k napětí výboje a teplotě substrátu. Výsledky jsou diskutovány v souvislosti s podmínkami pro růst nanotrubic. Je demonstrováno, že produkce těžkých reaktivních částic jako např. uhlovodíkových iontů probíhá převážně v oblasti stěnové vrstvy, poblíž substrátu se záporným předpětím. Tento závěr je podpořen modelovými výpočty výbojového proudu. (cs)
Title
  • Výzkum vnitřních parametrů plazmatu v reaktoru pro depozici uhlíkových nanotrubiček (cs)
  • Investigation of internal plasma parameters in a reactor for plasma enhanced hot filament chemical vapour deposition of carbon nanotubes
  • Investigation of internal plasma parameters in a reactor for plasma enhanced hot filament chemical vapour deposition of carbon nanotubes (en)
skos:prefLabel
  • Výzkum vnitřních parametrů plazmatu v reaktoru pro depozici uhlíkových nanotrubiček (cs)
  • Investigation of internal plasma parameters in a reactor for plasma enhanced hot filament chemical vapour deposition of carbon nanotubes
  • Investigation of internal plasma parameters in a reactor for plasma enhanced hot filament chemical vapour deposition of carbon nanotubes (en)
skos:notation
  • RIV/60076658:12410/04:00005611!RIV/2005/MSM/124105/N
http://linked.open.../vavai/riv/strany
  • 2709-2714
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • P(OC 527.60), Z(MSM 124100004)
http://linked.open...iv/cisloPeriodika
  • 37
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 568900
http://linked.open...ai/riv/idVysledku
  • RIV/60076658:12410/04:00005611
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • carbon nanotubes;chemical vapour deposition;Langmuir probe;plasma sheath (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...odStatuVydavatele
  • GB - Spojené království Velké Británie a Severního Irska
http://linked.open...ontrolniKodProRIV
  • [F335D7B7855B]
http://linked.open...i/riv/nazevZdroje
  • Journal of Physics D:Applied Physics
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...vavai/riv/projekt
http://linked.open...UplatneniVysledku
http://linked.open...v/svazekPeriodika
  • 2004
http://linked.open...iv/tvurceVysledku
  • Blažek, Josef
  • Špatenka, Petr
  • Leonhardt, Albert
  • Taeschner, Ch.
  • Pácal, F.
http://linked.open...n/vavai/riv/zamer
issn
  • 0022-3727
number of pages
http://localhost/t...ganizacniJednotka
  • 12410
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