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  • Langmuir probe diagnostics using thin cold cylindrical probe has been performed in r-z plane of a DC unbalanced magnetron discharge in argon at 0.5 and 2.5Pa. Important plasma parameters as the elektron density, plasma and floating potential have been extracted from the measured characteristics and its second derivative. We present typical probe characteristics at selected locations of the discharge as well as komplete spatial distributions of extracted plasma parameters. Comparison with results of recent PIC/MCC simulation is discussed.
  • Langmuir probe diagnostics using thin cold cylindrical probe has been performed in r-z plane of a DC unbalanced magnetron discharge in argon at 0.5 and 2.5Pa. Important plasma parameters as the elektron density, plasma and floating potential have been extracted from the measured characteristics and its second derivative. We present typical probe characteristics at selected locations of the discharge as well as komplete spatial distributions of extracted plasma parameters. Comparison with results of recent PIC/MCC simulation is discussed. (en)
Title
  • Mapping of the internal plasma parameters of an unbalanced magnetron DC discharge
  • Mapping of the internal plasma parameters of an unbalanced magnetron DC discharge (en)
skos:prefLabel
  • Mapping of the internal plasma parameters of an unbalanced magnetron DC discharge
  • Mapping of the internal plasma parameters of an unbalanced magnetron DC discharge (en)
skos:notation
  • RIV/60076658:12410/03:00004578!RIV/2004/MSM/124104/N
http://linked.open.../vavai/riv/strany
  • 104
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • Z(MSM 124100004)
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 614328
http://linked.open...ai/riv/idVysledku
  • RIV/60076658:12410/03:00004578
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • Spatial Langmuir probe measurement, unbalanced magnetron, Ti layers (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...ontrolniKodProRIV
  • [42E3E6A38513]
http://linked.open...v/mistoKonaniAkce
  • Taormina, Italy
http://linked.open...i/riv/mistoVydani
  • Bari
http://linked.open...i/riv/nazevZdroje
  • In: ISPC 16I, Full-Papers CD ( f. 523)
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...ocetUcastnikuAkce
http://linked.open...nichUcastnikuAkce
http://linked.open...UplatneniVysledku
http://linked.open...iv/tvurceVysledku
  • Adámek, Petr
  • Špatenka, Petr
  • Kvasnica, S.
http://linked.open...vavai/riv/typAkce
http://linked.open.../riv/zahajeniAkce
http://linked.open...n/vavai/riv/zamer
number of pages
http://purl.org/ne...btex#hasPublisher
  • University of Bari
http://localhost/t...ganizacniJednotka
  • 12410
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