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Description
  • Based on numerical calculations a new method has been developed, which enables plasma analysis from the average value of the Langmuir probe current measured in pulsed discharge. The application of this method for characterization of a planar reactor usedfor plasma enhanced chemical vapor deposition of TiN and (TiAl)N hard coatings is described as an example.
  • Based on numerical calculations a new method has been developed, which enables plasma analysis from the average value of the Langmuir probe current measured in pulsed discharge. The application of this method for characterization of a planar reactor usedfor plasma enhanced chemical vapor deposition of TiN and (TiAl)N hard coatings is described as an example. (en)
Title
  • Use of average value of Langmuir probe characteristic for characterization of pulsed discharges
  • Use of average value of Langmuir probe characteristic for characterization of pulsed discharges (en)
skos:prefLabel
  • Use of average value of Langmuir probe characteristic for characterization of pulsed discharges
  • Use of average value of Langmuir probe characteristic for characterization of pulsed discharges (en)
skos:notation
  • RIV/60076658:12410/03:00004549!RIV/2004/MSM/124104/N
http://linked.open.../vavai/riv/strany
  • 418-425
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • Z(MSM 124100004), Z(MSM 242100002)
http://linked.open...iv/cisloPeriodika
  • 7
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 632283
http://linked.open...ai/riv/idVysledku
  • RIV/60076658:12410/03:00004549
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • plasma, Langmuir probe, pulsed discharge (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...odStatuVydavatele
  • DE - Spolková republika Německo
http://linked.open...ontrolniKodProRIV
  • [0292EB5AA7D5]
http://linked.open...i/riv/nazevZdroje
  • Contributions to Plasma Physics
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...ocetUcastnikuAkce
http://linked.open...nichUcastnikuAkce
http://linked.open...UplatneniVysledku
http://linked.open...v/svazekPeriodika
  • 43
http://linked.open...iv/tvurceVysledku
  • Blažek, Josef
  • Špatenka, Petr
  • Leonhardt, Albert
  • Taeschner, Ch.
http://linked.open...n/vavai/riv/zamer
issn
  • 0863-1042
number of pages
http://localhost/t...ganizacniJednotka
  • 12410
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